JPS5490966A - Siliconncontained silicon carbide reactive tube - Google Patents

Siliconncontained silicon carbide reactive tube

Info

Publication number
JPS5490966A
JPS5490966A JP14354677A JP14354677A JPS5490966A JP S5490966 A JPS5490966 A JP S5490966A JP 14354677 A JP14354677 A JP 14354677A JP 14354677 A JP14354677 A JP 14354677A JP S5490966 A JPS5490966 A JP S5490966A
Authority
JP
Japan
Prior art keywords
siliconncontained
silicon carbide
reactive tube
carbide reactive
tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14354677A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6120128B2 (enrdf_load_stackoverflow
Inventor
Hideyasu Matsuo
Takayuki Shibuya
Takashi Tanaka
Toshiaki Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Original Assignee
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Ceramics Co Ltd filed Critical Toshiba Ceramics Co Ltd
Priority to JP14354677A priority Critical patent/JPS5490966A/ja
Publication of JPS5490966A publication Critical patent/JPS5490966A/ja
Publication of JPS6120128B2 publication Critical patent/JPS6120128B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Furnace Details (AREA)
JP14354677A 1977-11-30 1977-11-30 Siliconncontained silicon carbide reactive tube Granted JPS5490966A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14354677A JPS5490966A (en) 1977-11-30 1977-11-30 Siliconncontained silicon carbide reactive tube

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14354677A JPS5490966A (en) 1977-11-30 1977-11-30 Siliconncontained silicon carbide reactive tube

Publications (2)

Publication Number Publication Date
JPS5490966A true JPS5490966A (en) 1979-07-19
JPS6120128B2 JPS6120128B2 (enrdf_load_stackoverflow) 1986-05-21

Family

ID=15341253

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14354677A Granted JPS5490966A (en) 1977-11-30 1977-11-30 Siliconncontained silicon carbide reactive tube

Country Status (1)

Country Link
JP (1) JPS5490966A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5884427A (ja) * 1981-11-13 1983-05-20 Toshiba Corp 半導体拡散層形成用炉管
DE3701691A1 (de) * 1986-07-31 1988-02-04 Toshiba Ceramics Co Verfahren zum herstellen einer ofenkomponente
JPS63312630A (ja) * 1987-06-15 1988-12-21 Toshiba Ceramics Co Ltd 半導体ウェ−ハの熱処理装置
JPH0410531A (ja) * 1990-04-27 1992-01-14 Toshiba Ceramics Co Ltd 縦型拡散炉
WO2018150946A1 (ja) * 2017-02-20 2018-08-23 株式会社エンプラス 微小流路のコーティング装置および微小流路のコーティング方法

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5884427A (ja) * 1981-11-13 1983-05-20 Toshiba Corp 半導体拡散層形成用炉管
DE3701691A1 (de) * 1986-07-31 1988-02-04 Toshiba Ceramics Co Verfahren zum herstellen einer ofenkomponente
JPS63312630A (ja) * 1987-06-15 1988-12-21 Toshiba Ceramics Co Ltd 半導体ウェ−ハの熱処理装置
JPH0410531A (ja) * 1990-04-27 1992-01-14 Toshiba Ceramics Co Ltd 縦型拡散炉
WO2018150946A1 (ja) * 2017-02-20 2018-08-23 株式会社エンプラス 微小流路のコーティング装置および微小流路のコーティング方法
JP2018135545A (ja) * 2017-02-20 2018-08-30 株式会社エンプラス 微小流路のコーティング装置および微小流路のコーティング方法

Also Published As

Publication number Publication date
JPS6120128B2 (enrdf_load_stackoverflow) 1986-05-21

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