JPS5489623A - Heat resistant photoresist composition and production thereof - Google Patents
Heat resistant photoresist composition and production thereofInfo
- Publication number
- JPS5489623A JPS5489623A JP15668777A JP15668777A JPS5489623A JP S5489623 A JPS5489623 A JP S5489623A JP 15668777 A JP15668777 A JP 15668777A JP 15668777 A JP15668777 A JP 15668777A JP S5489623 A JPS5489623 A JP S5489623A
- Authority
- JP
- Japan
- Prior art keywords
- production
- heat resistant
- photoresist composition
- resistant photoresist
- composition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15668777A JPS6023341B2 (en) | 1977-12-27 | 1977-12-27 | Heat-resistant photoresist composition and method for producing the same |
GB7844576A GB2008784B (en) | 1977-11-17 | 1978-11-15 | Heat resistant photoresist composition and process for preparing the same |
US05/961,462 US4208477A (en) | 1977-12-26 | 1978-11-16 | Heat resistant photoresist composition and process for preparing the same |
FR7832525A FR2409535A1 (en) | 1977-11-17 | 1978-11-17 | HEAT-RESISTANT "PHOTORESIST" COMPOSITION AND METHOD FOR PREPARING THE SAME |
DE19782849981 DE2849981A1 (en) | 1977-11-17 | 1978-11-17 | HEAT-RESISTANT PHOTORESIS MATERIAL AND METHOD FOR MANUFACTURING IT |
US06/104,050 US4316974A (en) | 1977-12-26 | 1979-12-17 | Polymers for use in heat resistant photoresist composition and process for preparing the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15668777A JPS6023341B2 (en) | 1977-12-27 | 1977-12-27 | Heat-resistant photoresist composition and method for producing the same |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5489623A true JPS5489623A (en) | 1979-07-16 |
JPS6023341B2 JPS6023341B2 (en) | 1985-06-07 |
Family
ID=15633123
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15668777A Expired JPS6023341B2 (en) | 1977-11-17 | 1977-12-27 | Heat-resistant photoresist composition and method for producing the same |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6023341B2 (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS572317A (en) * | 1980-06-07 | 1982-01-07 | Toshiba Chem Corp | Thermosetting resin composition |
JPS572316A (en) * | 1980-06-05 | 1982-01-07 | Toshiba Chem Corp | Thermosetting resin composition |
JPS5920304A (en) * | 1982-07-27 | 1984-02-02 | Nippon Oil & Fats Co Ltd | Photopolymerization initiator composition |
JPS6088939A (en) * | 1983-10-21 | 1985-05-18 | Shin Etsu Chem Co Ltd | Photosensitive composition |
JPS63318549A (en) * | 1987-06-22 | 1988-12-27 | Hitachi Ltd | Heatresistant photosensitive polymer composition |
JPH11327135A (en) * | 1998-05-20 | 1999-11-26 | Fujitsu Ltd | Photosensitive heat-resistant resin composition, method for forming pattern of heat-resistant insulating film using this composition, and patterned heat-resistant insulating film obtained by this method |
JP2006342335A (en) * | 2005-05-11 | 2006-12-21 | Hitachi Chem Co Ltd | Polyamide-imide and resin composition |
-
1977
- 1977-12-27 JP JP15668777A patent/JPS6023341B2/en not_active Expired
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS572316A (en) * | 1980-06-05 | 1982-01-07 | Toshiba Chem Corp | Thermosetting resin composition |
JPH029050B2 (en) * | 1980-06-05 | 1990-02-28 | Toshiba Chem Prod | |
JPS572317A (en) * | 1980-06-07 | 1982-01-07 | Toshiba Chem Corp | Thermosetting resin composition |
JPH029051B2 (en) * | 1980-06-07 | 1990-02-28 | Toshiba Chem Prod | |
JPS5920304A (en) * | 1982-07-27 | 1984-02-02 | Nippon Oil & Fats Co Ltd | Photopolymerization initiator composition |
JPH0463882B2 (en) * | 1982-07-27 | 1992-10-13 | Nippon Oils & Fats Co Ltd | |
JPS6088939A (en) * | 1983-10-21 | 1985-05-18 | Shin Etsu Chem Co Ltd | Photosensitive composition |
JPS63318549A (en) * | 1987-06-22 | 1988-12-27 | Hitachi Ltd | Heatresistant photosensitive polymer composition |
JPH11327135A (en) * | 1998-05-20 | 1999-11-26 | Fujitsu Ltd | Photosensitive heat-resistant resin composition, method for forming pattern of heat-resistant insulating film using this composition, and patterned heat-resistant insulating film obtained by this method |
JP2006342335A (en) * | 2005-05-11 | 2006-12-21 | Hitachi Chem Co Ltd | Polyamide-imide and resin composition |
Also Published As
Publication number | Publication date |
---|---|
JPS6023341B2 (en) | 1985-06-07 |
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