JPS5487066A - Semiconductor wafer - Google Patents
Semiconductor waferInfo
- Publication number
- JPS5487066A JPS5487066A JP15524577A JP15524577A JPS5487066A JP S5487066 A JPS5487066 A JP S5487066A JP 15524577 A JP15524577 A JP 15524577A JP 15524577 A JP15524577 A JP 15524577A JP S5487066 A JPS5487066 A JP S5487066A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- distortion
- semiconductor wafer
- heat
- heat treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Bipolar Transistors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15524577A JPS5487066A (en) | 1977-12-22 | 1977-12-22 | Semiconductor wafer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15524577A JPS5487066A (en) | 1977-12-22 | 1977-12-22 | Semiconductor wafer |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5487066A true JPS5487066A (en) | 1979-07-11 |
Family
ID=15601695
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15524577A Pending JPS5487066A (en) | 1977-12-22 | 1977-12-22 | Semiconductor wafer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5487066A (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54148474A (en) * | 1978-05-15 | 1979-11-20 | Nec Corp | Manufacture of semiconductor device |
JPS5874044A (ja) * | 1981-10-29 | 1983-05-04 | Matsushita Electric Ind Co Ltd | 半導体基板及びそれを用いた半導体装置の製造方法 |
JPS61198637A (ja) * | 1986-01-24 | 1986-09-03 | Nec Corp | 半導体単結晶ウエハ−の製法 |
JP2007109838A (ja) * | 2005-10-13 | 2007-04-26 | Disco Abrasive Syst Ltd | デバイスおよびその製造方法 |
-
1977
- 1977-12-22 JP JP15524577A patent/JPS5487066A/ja active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54148474A (en) * | 1978-05-15 | 1979-11-20 | Nec Corp | Manufacture of semiconductor device |
JPS5874044A (ja) * | 1981-10-29 | 1983-05-04 | Matsushita Electric Ind Co Ltd | 半導体基板及びそれを用いた半導体装置の製造方法 |
JPS61198637A (ja) * | 1986-01-24 | 1986-09-03 | Nec Corp | 半導体単結晶ウエハ−の製法 |
JPH0235456B2 (ja) * | 1986-01-24 | 1990-08-10 | Nippon Electric Co | |
JP2007109838A (ja) * | 2005-10-13 | 2007-04-26 | Disco Abrasive Syst Ltd | デバイスおよびその製造方法 |
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