JPS548070B2 - - Google Patents
Info
- Publication number
- JPS548070B2 JPS548070B2 JP13475275A JP13475275A JPS548070B2 JP S548070 B2 JPS548070 B2 JP S548070B2 JP 13475275 A JP13475275 A JP 13475275A JP 13475275 A JP13475275 A JP 13475275A JP S548070 B2 JPS548070 B2 JP S548070B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70358—Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19742460914 DE2460914C2 (en) | 1974-12-21 | 1974-12-21 | Photolithographic projection apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5186975A JPS5186975A (en) | 1976-07-30 |
| JPS548070B2 true JPS548070B2 (en) | 1979-04-12 |
Family
ID=5934300
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13475275A Expired JPS548070B2 (en) | 1974-12-21 | 1975-11-11 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS548070B2 (en) |
| DE (1) | DE2460914C2 (en) |
| FR (1) | FR2295452A2 (en) |
| GB (1) | GB1510007A (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2633297A1 (en) * | 1976-07-23 | 1978-01-26 | Siemens Ag | AUTOMATIC ADJUSTMENT PROCEDURE |
| DE2635275C2 (en) * | 1976-08-05 | 1984-09-06 | Siemens AG, 1000 Berlin und 8000 München | Method for adjusting a disk-shaped substrate relative to a photomask in an X-ray exposure apparatus |
| DE2757386C3 (en) * | 1977-12-22 | 1981-11-26 | Agfa-Gevaert Ag, 5090 Leverkusen | Exposure arrangement for copiers |
| FR2450470A1 (en) * | 1979-02-27 | 1980-09-26 | Thomson Csf | OPTICAL PROJECTION SYSTEM IN PHOTOREPETITION |
| JP2576814B2 (en) * | 1995-06-16 | 1997-01-29 | 株式会社日立製作所 | Exposure method |
| TWI237307B (en) | 2003-05-01 | 2005-08-01 | Nikon Corp | Optical projection system, light exposing apparatus and light exposing method |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2464793A (en) * | 1942-08-08 | 1949-03-22 | Lester Cooke Jr H | Method and apparatus for photographic scanning |
| DE1173327B (en) * | 1961-04-10 | 1964-07-02 | Logetronics Inc | Arrangement for detecting and automatically adjusting the focus in a photographic device |
| DE2050590C2 (en) * | 1970-10-15 | 1982-06-16 | Ibm Deutschland Gmbh, 7000 Stuttgart | Projection device |
| US3819265A (en) * | 1972-08-02 | 1974-06-25 | Bell Telephone Labor Inc | Scanning projection printer apparatus and method |
-
1974
- 1974-12-21 DE DE19742460914 patent/DE2460914C2/en not_active Expired
-
1975
- 1975-11-06 GB GB4598375A patent/GB1510007A/en not_active Expired
- 1975-11-07 FR FR7534729A patent/FR2295452A2/en active Granted
- 1975-11-11 JP JP13475275A patent/JPS548070B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5186975A (en) | 1976-07-30 |
| DE2460914C2 (en) | 1983-08-18 |
| FR2295452A2 (en) | 1976-07-16 |
| GB1510007A (en) | 1978-05-10 |
| FR2295452B2 (en) | 1977-12-16 |
| DE2460914A1 (en) | 1976-06-24 |