JPS5478079A - Wafer washing and drying unit - Google Patents

Wafer washing and drying unit

Info

Publication number
JPS5478079A
JPS5478079A JP14497077A JP14497077A JPS5478079A JP S5478079 A JPS5478079 A JP S5478079A JP 14497077 A JP14497077 A JP 14497077A JP 14497077 A JP14497077 A JP 14497077A JP S5478079 A JPS5478079 A JP S5478079A
Authority
JP
Japan
Prior art keywords
wafer
storage part
opened
fixed position
unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14497077A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6211495B2 (enrdf_load_stackoverflow
Inventor
Susumu Nanko
Toshio Nonaka
Kimio Muramatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14497077A priority Critical patent/JPS5478079A/ja
Publication of JPS5478079A publication Critical patent/JPS5478079A/ja
Publication of JPS6211495B2 publication Critical patent/JPS6211495B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)
  • Drying Of Solid Materials (AREA)
JP14497077A 1977-12-05 1977-12-05 Wafer washing and drying unit Granted JPS5478079A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14497077A JPS5478079A (en) 1977-12-05 1977-12-05 Wafer washing and drying unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14497077A JPS5478079A (en) 1977-12-05 1977-12-05 Wafer washing and drying unit

Publications (2)

Publication Number Publication Date
JPS5478079A true JPS5478079A (en) 1979-06-21
JPS6211495B2 JPS6211495B2 (enrdf_load_stackoverflow) 1987-03-12

Family

ID=15374422

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14497077A Granted JPS5478079A (en) 1977-12-05 1977-12-05 Wafer washing and drying unit

Country Status (1)

Country Link
JP (1) JPS5478079A (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55154736A (en) * 1979-05-23 1980-12-02 Sigma Gijutsu Kogyo Kk Centrifugal drier
JPS563424U (enrdf_load_stackoverflow) * 1979-06-20 1981-01-13
JPS5954925U (ja) * 1982-10-01 1984-04-10 東邦化成株式会社 ウエ−ハ用回転乾燥装置
JPS59171337U (ja) * 1983-04-30 1984-11-16 東京エレクトロン株式会社 半導体ウエハ洗浄装置
JPS6375036U (enrdf_load_stackoverflow) * 1987-07-08 1988-05-19
CN102679714A (zh) * 2012-05-30 2012-09-19 无锡市优耐特石化装备有限公司 一种带连接圈的甩干机内桶

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55154736A (en) * 1979-05-23 1980-12-02 Sigma Gijutsu Kogyo Kk Centrifugal drier
JPS563424U (enrdf_load_stackoverflow) * 1979-06-20 1981-01-13
JPS5954925U (ja) * 1982-10-01 1984-04-10 東邦化成株式会社 ウエ−ハ用回転乾燥装置
JPS59171337U (ja) * 1983-04-30 1984-11-16 東京エレクトロン株式会社 半導体ウエハ洗浄装置
JPS6375036U (enrdf_load_stackoverflow) * 1987-07-08 1988-05-19
CN102679714A (zh) * 2012-05-30 2012-09-19 无锡市优耐特石化装备有限公司 一种带连接圈的甩干机内桶

Also Published As

Publication number Publication date
JPS6211495B2 (enrdf_load_stackoverflow) 1987-03-12

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