JPS5474100A - Fixation processing system of waste gas - Google Patents
Fixation processing system of waste gasInfo
- Publication number
- JPS5474100A JPS5474100A JP14036577A JP14036577A JPS5474100A JP S5474100 A JPS5474100 A JP S5474100A JP 14036577 A JP14036577 A JP 14036577A JP 14036577 A JP14036577 A JP 14036577A JP S5474100 A JPS5474100 A JP S5474100A
- Authority
- JP
- Japan
- Prior art keywords
- ion
- sputtering
- target
- waste gas
- feed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Abstract
PURPOSE: To secure working efficiency and storage stability by feed fixation in simultaneous sputtering with storage target after the ionization of radiation waste gas.
CONSTITUTION: The waste gas enters into the ion source 4 from the radiation gas storage source 2 to make ionization, generating ion beam 14 accelerating with the accelerator 5, and injecting to the ion feed chamber 8 after passing through ion separation magnet 6 and shielding chamber 7. The ion feed chamber 8 is provided with shuttering target 9 and the storage target 12 against thereto. When the ion beam 14 injects against the sputtering target 9, the sputtering atom 10 is emitted to adhere with the storage target 12. Accordingly, this enables the ion feeding and the fixation of feed ion by sputtering to achieve automatically in simultaneous performance.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14036577A JPS5474100A (en) | 1977-11-22 | 1977-11-22 | Fixation processing system of waste gas |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14036577A JPS5474100A (en) | 1977-11-22 | 1977-11-22 | Fixation processing system of waste gas |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5474100A true JPS5474100A (en) | 1979-06-13 |
Family
ID=15267119
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14036577A Pending JPS5474100A (en) | 1977-11-22 | 1977-11-22 | Fixation processing system of waste gas |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5474100A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8379789B2 (en) | 2004-05-30 | 2013-02-19 | Pebble Bed Modular Reactor (Proprietary) Limited | Nuclear plant |
-
1977
- 1977-11-22 JP JP14036577A patent/JPS5474100A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8379789B2 (en) | 2004-05-30 | 2013-02-19 | Pebble Bed Modular Reactor (Proprietary) Limited | Nuclear plant |
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