JPS547276A - Fine adjustment unit for stage - Google Patents
Fine adjustment unit for stageInfo
- Publication number
- JPS547276A JPS547276A JP7314377A JP7314377A JPS547276A JP S547276 A JPS547276 A JP S547276A JP 7314377 A JP7314377 A JP 7314377A JP 7314377 A JP7314377 A JP 7314377A JP S547276 A JPS547276 A JP S547276A
- Authority
- JP
- Japan
- Prior art keywords
- stage
- adjustment unit
- fine adjustment
- fluid flowing
- space
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Control Of Position Or Direction (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Diaphragms And Bellows (AREA)
Abstract
PURPOSE: To fine-adjust a stair vertically, by forming a space, which contains a fluid flowing inside, between the stage and a support base body supporting it and by controlling the pressure of the fluid flowing into the space part.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7314377A JPS547276A (en) | 1977-06-20 | 1977-06-20 | Fine adjustment unit for stage |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7314377A JPS547276A (en) | 1977-06-20 | 1977-06-20 | Fine adjustment unit for stage |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS547276A true JPS547276A (en) | 1979-01-19 |
JPS5612014B2 JPS5612014B2 (en) | 1981-03-18 |
Family
ID=13509673
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7314377A Granted JPS547276A (en) | 1977-06-20 | 1977-06-20 | Fine adjustment unit for stage |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS547276A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6332949A (en) * | 1986-07-24 | 1988-02-12 | Yokogawa Hewlett Packard Ltd | Hot chucking device |
US4778143A (en) * | 1984-06-15 | 1988-10-18 | Omron Tateisi Electronics Co. | Apparatus for locking movable table |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0345810U (en) * | 1989-09-11 | 1991-04-26 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4921467A (en) * | 1972-06-20 | 1974-02-25 |
-
1977
- 1977-06-20 JP JP7314377A patent/JPS547276A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4921467A (en) * | 1972-06-20 | 1974-02-25 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4778143A (en) * | 1984-06-15 | 1988-10-18 | Omron Tateisi Electronics Co. | Apparatus for locking movable table |
JPS6332949A (en) * | 1986-07-24 | 1988-02-12 | Yokogawa Hewlett Packard Ltd | Hot chucking device |
Also Published As
Publication number | Publication date |
---|---|
JPS5612014B2 (en) | 1981-03-18 |
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