JPS4921467A - - Google Patents
Info
- Publication number
- JPS4921467A JPS4921467A JP6101972A JP6101972A JPS4921467A JP S4921467 A JPS4921467 A JP S4921467A JP 6101972 A JP6101972 A JP 6101972A JP 6101972 A JP6101972 A JP 6101972A JP S4921467 A JPS4921467 A JP S4921467A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6101972A JPS4921467A (en) | 1972-06-20 | 1972-06-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6101972A JPS4921467A (en) | 1972-06-20 | 1972-06-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4921467A true JPS4921467A (en) | 1974-02-25 |
Family
ID=13159175
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6101972A Pending JPS4921467A (en) | 1972-06-20 | 1972-06-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4921467A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS547276A (en) * | 1977-06-20 | 1979-01-19 | Nippon Telegr & Teleph Corp <Ntt> | Fine adjustment unit for stage |
| JPS5816532A (en) * | 1979-05-11 | 1983-01-31 | アメリカン、セミコンダクター、イクイップメント、テクノロジーズ | Positioning device |
| JPS6263429A (en) * | 1985-09-13 | 1987-03-20 | Iwatsu Electric Co Ltd | Method and apparatus for resist exposure |
-
1972
- 1972-06-20 JP JP6101972A patent/JPS4921467A/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS547276A (en) * | 1977-06-20 | 1979-01-19 | Nippon Telegr & Teleph Corp <Ntt> | Fine adjustment unit for stage |
| JPS5612014B2 (en) * | 1977-06-20 | 1981-03-18 | ||
| JPS5816532A (en) * | 1979-05-11 | 1983-01-31 | アメリカン、セミコンダクター、イクイップメント、テクノロジーズ | Positioning device |
| JPS638609B2 (en) * | 1979-05-11 | 1988-02-23 | Electromask Inc | |
| JPS6263429A (en) * | 1985-09-13 | 1987-03-20 | Iwatsu Electric Co Ltd | Method and apparatus for resist exposure |