JPS5470061A - Laser sealing apparatus - Google Patents

Laser sealing apparatus

Info

Publication number
JPS5470061A
JPS5470061A JP13741277A JP13741277A JPS5470061A JP S5470061 A JPS5470061 A JP S5470061A JP 13741277 A JP13741277 A JP 13741277A JP 13741277 A JP13741277 A JP 13741277A JP S5470061 A JPS5470061 A JP S5470061A
Authority
JP
Japan
Prior art keywords
mirror
laser
thru
sealed
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13741277A
Other languages
Japanese (ja)
Inventor
Takeshi Tamai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP13741277A priority Critical patent/JPS5470061A/en
Publication of JPS5470061A publication Critical patent/JPS5470061A/en
Pending legal-status Critical Current

Links

Landscapes

  • Laser Beam Processing (AREA)
  • Mechanical Optical Scanning Systems (AREA)

Abstract

PURPOSE: To perform simultaneous laser sealing to plural objects to be sealed at a high speed by simultaneously scanning a plurality of the split laser beams.
CONSTITUTION: The laser beam from a laser device 1 is bisected by a splitting mirror 3. one whereof is then reflected by a mirror 4a and the other by mirrors 4b, 4c. These are next made to plural parallel laser beams by bisecting and reflecting half mirror groups 5a thur 5c, 6a thru 6c respectively, and are imaged onto the object group 11 to be sealed such as semiconductor packages, etc. via reflecting mirror 9, condensing lens group 10. The light scanning of this case is accomplished in the perpendicularly intersecting two directions which accompany turning of the mirror groups 5a thru 5c and 6a thru 6c via the scanning lever 12 actuating cooperating with a pulse motor 13 and the control of oscillation of the device 1 by the encoder 16 provided to the other end of the revolving shaft 15 of the mirror 9 which is revolved by a DC motor 14, whereby simultaneous high-speed sealing to the plural objects to be sealed wherein best use is made of the advantages by laser machining is accomplished with the simple constitution.
COPYRIGHT: (C)1979,JPO&Japio
JP13741277A 1977-11-15 1977-11-15 Laser sealing apparatus Pending JPS5470061A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13741277A JPS5470061A (en) 1977-11-15 1977-11-15 Laser sealing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13741277A JPS5470061A (en) 1977-11-15 1977-11-15 Laser sealing apparatus

Publications (1)

Publication Number Publication Date
JPS5470061A true JPS5470061A (en) 1979-06-05

Family

ID=15198022

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13741277A Pending JPS5470061A (en) 1977-11-15 1977-11-15 Laser sealing apparatus

Country Status (1)

Country Link
JP (1) JPS5470061A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57157916U (en) * 1981-03-31 1982-10-04
JPH01166893A (en) * 1987-12-21 1989-06-30 Kirin Brewery Co Ltd Laser beam marking device
JPH01260310A (en) * 1988-04-11 1989-10-17 Komatsu Ltd Rotary drive apparatus of laser beam projector in position measuring apparatus using laser beam
JP2005152970A (en) * 2003-11-27 2005-06-16 Disco Abrasive Syst Ltd Laser beam machining mechanism
WO2012048872A1 (en) * 2010-10-14 2012-04-19 Manz Ag Optical system for splitting a laser beam comprising cascaded, adjustable beam splitters

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57157916U (en) * 1981-03-31 1982-10-04
JPH01166893A (en) * 1987-12-21 1989-06-30 Kirin Brewery Co Ltd Laser beam marking device
JPH01260310A (en) * 1988-04-11 1989-10-17 Komatsu Ltd Rotary drive apparatus of laser beam projector in position measuring apparatus using laser beam
JP2005152970A (en) * 2003-11-27 2005-06-16 Disco Abrasive Syst Ltd Laser beam machining mechanism
WO2012048872A1 (en) * 2010-10-14 2012-04-19 Manz Ag Optical system for splitting a laser beam comprising cascaded, adjustable beam splitters

Similar Documents

Publication Publication Date Title
CA2031885A1 (en) Apparatus for the threedimensional inspection of hollow bodies
JPS5596916A (en) Two-dimensional scanner
JPS51122483A (en) Scanner type inspection device
JPS5248331A (en) Scanning system with light beam
JPS55131728A (en) Optical scanning device
JPS5430854A (en) Two-dimensional scanner
JPS5470061A (en) Laser sealing apparatus
JPS54158944A (en) Light beam scanner
JPS5226844A (en) Microscope
JPS5455184A (en) Semiconductor laser light source unit
JPS5342047A (en) Scanner of optical beam
EP0110231A3 (en) Device for focusing and blending a laser beam
JPS57171625A (en) Hardening device for shaftlike object
JPS5318387A (en) Pattern inspection system
JPS52132848A (en) Simultaneous light detecting method
JPS5747593A (en) Laser device
JPS5421857A (en) Light scanner
JPS5512958A (en) Polar coordinate optical system for laser marker
EP0131290A3 (en) A rotatable mirror arrangement for generating a scanning beam which is displaced in steps parallel to itself
ATE77484T1 (en) DEVICE FOR TESTING HIGH-SPEED MOVING WEB-FORMS.
JPS5512931A (en) Device for scanning light spot
JPS53147554A (en) Laser beam recorder
JPS5444553A (en) Optical scanner
JPS5499644A (en) Optical beam scanning method
JPS5267663A (en) Range finding method of photoelectric type