JPS5467770A - Gas phase growing method - Google Patents

Gas phase growing method

Info

Publication number
JPS5467770A
JPS5467770A JP13407077A JP13407077A JPS5467770A JP S5467770 A JPS5467770 A JP S5467770A JP 13407077 A JP13407077 A JP 13407077A JP 13407077 A JP13407077 A JP 13407077A JP S5467770 A JPS5467770 A JP S5467770A
Authority
JP
Japan
Prior art keywords
gas phase
growing method
phase growing
gas
phase
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13407077A
Other languages
English (en)
Inventor
Harushige Kurokawa
Yoshihide Endou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Denki Electric Inc
Original Assignee
Kokusai Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kokusai Electric Co Ltd filed Critical Kokusai Electric Co Ltd
Priority to JP13407077A priority Critical patent/JPS5467770A/ja
Publication of JPS5467770A publication Critical patent/JPS5467770A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)
JP13407077A 1977-11-10 1977-11-10 Gas phase growing method Pending JPS5467770A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13407077A JPS5467770A (en) 1977-11-10 1977-11-10 Gas phase growing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13407077A JPS5467770A (en) 1977-11-10 1977-11-10 Gas phase growing method

Publications (1)

Publication Number Publication Date
JPS5467770A true JPS5467770A (en) 1979-05-31

Family

ID=15119666

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13407077A Pending JPS5467770A (en) 1977-11-10 1977-11-10 Gas phase growing method

Country Status (1)

Country Link
JP (1) JPS5467770A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02166736A (ja) * 1988-12-20 1990-06-27 Fujitsu Ltd 半導体装置及びその製造方法
JPH0794506A (ja) * 1993-09-21 1995-04-07 Nec Corp 半導体装置の製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49123497A (ja) * 1973-04-02 1974-11-26
JPS49123483A (ja) * 1973-04-02 1974-11-26

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49123497A (ja) * 1973-04-02 1974-11-26
JPS49123483A (ja) * 1973-04-02 1974-11-26

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02166736A (ja) * 1988-12-20 1990-06-27 Fujitsu Ltd 半導体装置及びその製造方法
JPH0794506A (ja) * 1993-09-21 1995-04-07 Nec Corp 半導体装置の製造方法

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