JPS5395137A - Low temperature gas phase plating method - Google Patents

Low temperature gas phase plating method

Info

Publication number
JPS5395137A
JPS5395137A JP996977A JP996977A JPS5395137A JP S5395137 A JPS5395137 A JP S5395137A JP 996977 A JP996977 A JP 996977A JP 996977 A JP996977 A JP 996977A JP S5395137 A JPS5395137 A JP S5395137A
Authority
JP
Japan
Prior art keywords
low temperature
gas phase
plating method
temperature gas
phase plating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP996977A
Other languages
Japanese (ja)
Other versions
JPS5523902B2 (en
Inventor
Hiroshi Yamazaki
Makoto Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oriental Engineering Co Ltd
Original Assignee
Oriental Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oriental Engineering Co Ltd filed Critical Oriental Engineering Co Ltd
Priority to JP996977A priority Critical patent/JPS5395137A/en
Publication of JPS5395137A publication Critical patent/JPS5395137A/en
Publication of JPS5523902B2 publication Critical patent/JPS5523902B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP996977A 1977-02-01 1977-02-01 Low temperature gas phase plating method Granted JPS5395137A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP996977A JPS5395137A (en) 1977-02-01 1977-02-01 Low temperature gas phase plating method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP996977A JPS5395137A (en) 1977-02-01 1977-02-01 Low temperature gas phase plating method

Publications (2)

Publication Number Publication Date
JPS5395137A true JPS5395137A (en) 1978-08-19
JPS5523902B2 JPS5523902B2 (en) 1980-06-25

Family

ID=11734741

Family Applications (1)

Application Number Title Priority Date Filing Date
JP996977A Granted JPS5395137A (en) 1977-02-01 1977-02-01 Low temperature gas phase plating method

Country Status (1)

Country Link
JP (1) JPS5395137A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63255366A (en) * 1987-04-10 1988-10-21 Nissin Electric Co Ltd Method for coating conductive film on insulating substrate
JPH01100259A (en) * 1987-08-26 1989-04-18 Detlev Repenning Production of high hardness and/or friction reduced layer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63255366A (en) * 1987-04-10 1988-10-21 Nissin Electric Co Ltd Method for coating conductive film on insulating substrate
JPH01100259A (en) * 1987-08-26 1989-04-18 Detlev Repenning Production of high hardness and/or friction reduced layer

Also Published As

Publication number Publication date
JPS5523902B2 (en) 1980-06-25

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