JPS5465595A - Defect inspector - Google Patents

Defect inspector

Info

Publication number
JPS5465595A
JPS5465595A JP13234977A JP13234977A JPS5465595A JP S5465595 A JPS5465595 A JP S5465595A JP 13234977 A JP13234977 A JP 13234977A JP 13234977 A JP13234977 A JP 13234977A JP S5465595 A JPS5465595 A JP S5465595A
Authority
JP
Japan
Prior art keywords
lighting
optical axis
pattern
focal plane
defects
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13234977A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6112538B2 (enrdf_load_stackoverflow
Inventor
Masayuki Naruse
Shige Yamada
Koji Nakamura
Akira Takagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP13234977A priority Critical patent/JPS5465595A/ja
Publication of JPS5465595A publication Critical patent/JPS5465595A/ja
Publication of JPS6112538B2 publication Critical patent/JPS6112538B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
JP13234977A 1977-11-02 1977-11-02 Defect inspector Granted JPS5465595A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13234977A JPS5465595A (en) 1977-11-02 1977-11-02 Defect inspector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13234977A JPS5465595A (en) 1977-11-02 1977-11-02 Defect inspector

Publications (2)

Publication Number Publication Date
JPS5465595A true JPS5465595A (en) 1979-05-26
JPS6112538B2 JPS6112538B2 (enrdf_load_stackoverflow) 1986-04-09

Family

ID=15079265

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13234977A Granted JPS5465595A (en) 1977-11-02 1977-11-02 Defect inspector

Country Status (1)

Country Link
JP (1) JPS5465595A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5661570U (enrdf_load_stackoverflow) * 1979-10-15 1981-05-25
JPS57132044A (en) * 1981-02-10 1982-08-16 Hitachi Metals Ltd Discriminating method of surface defect
JPS62174639A (ja) * 1986-01-28 1987-07-31 Fuji Electric Co Ltd 被検査物体の表面不連続部検出方式
JP2014115608A (ja) * 2012-11-15 2014-06-26 Ricoh Co Ltd 画像形成装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5661570U (enrdf_load_stackoverflow) * 1979-10-15 1981-05-25
JPS57132044A (en) * 1981-02-10 1982-08-16 Hitachi Metals Ltd Discriminating method of surface defect
JPS62174639A (ja) * 1986-01-28 1987-07-31 Fuji Electric Co Ltd 被検査物体の表面不連続部検出方式
JP2014115608A (ja) * 2012-11-15 2014-06-26 Ricoh Co Ltd 画像形成装置

Also Published As

Publication number Publication date
JPS6112538B2 (enrdf_load_stackoverflow) 1986-04-09

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