JPS5463670A - Transverse impurity diffusion furnace - Google Patents

Transverse impurity diffusion furnace

Info

Publication number
JPS5463670A
JPS5463670A JP12962477A JP12962477A JPS5463670A JP S5463670 A JPS5463670 A JP S5463670A JP 12962477 A JP12962477 A JP 12962477A JP 12962477 A JP12962477 A JP 12962477A JP S5463670 A JPS5463670 A JP S5463670A
Authority
JP
Japan
Prior art keywords
jig
impurity diffusion
samples
easy
putting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12962477A
Other languages
Japanese (ja)
Other versions
JPS6051260B2 (en
Inventor
Masataka Fukuyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12962477A priority Critical patent/JPS6051260B2/en
Publication of JPS5463670A publication Critical patent/JPS5463670A/en
Publication of JPS6051260B2 publication Critical patent/JPS6051260B2/en
Expired legal-status Critical Current

Links

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  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE: To make the putting-in and out of samples easy by giving a structure where one side of a jig in the longer direction is extended up to one end of a quartz tube or near it.
CONSTITUTION: A jig is provided with extension part 11, and the end of part 11 is extended near one end of quartz tube 1. At an impurity diffusion processing time, samples are put into or out from the quartz tube by inserting the head of pulling-out bar 9 into hole 3A of sample putting jig 3 to reciprocate jig 3 on jig 2. Only the jig where light substrate 4 is put on is pulled out, so that the putting-in and out of samples is easy, and the washing and the loading of jig 11 are easy.
COPYRIGHT: (C)1979,JPO&Japio
JP12962477A 1977-10-31 1977-10-31 Horizontal impurity diffusion furnace Expired JPS6051260B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12962477A JPS6051260B2 (en) 1977-10-31 1977-10-31 Horizontal impurity diffusion furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12962477A JPS6051260B2 (en) 1977-10-31 1977-10-31 Horizontal impurity diffusion furnace

Publications (2)

Publication Number Publication Date
JPS5463670A true JPS5463670A (en) 1979-05-22
JPS6051260B2 JPS6051260B2 (en) 1985-11-13

Family

ID=15014073

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12962477A Expired JPS6051260B2 (en) 1977-10-31 1977-10-31 Horizontal impurity diffusion furnace

Country Status (1)

Country Link
JP (1) JPS6051260B2 (en)

Also Published As

Publication number Publication date
JPS6051260B2 (en) 1985-11-13

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