JPS5461465A - Method of fabricating semiconductor - Google Patents

Method of fabricating semiconductor

Info

Publication number
JPS5461465A
JPS5461465A JP12754277A JP12754277A JPS5461465A JP S5461465 A JPS5461465 A JP S5461465A JP 12754277 A JP12754277 A JP 12754277A JP 12754277 A JP12754277 A JP 12754277A JP S5461465 A JPS5461465 A JP S5461465A
Authority
JP
Japan
Prior art keywords
fabricating semiconductor
fabricating
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12754277A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6130417B2 (enrdf_load_stackoverflow
Inventor
Osamu Kasahara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHO LSI GIJUTSU KENKYU KUMIAI
Priority to JP12754277A priority Critical patent/JPS5461465A/ja
Publication of JPS5461465A publication Critical patent/JPS5461465A/ja
Publication of JPS6130417B2 publication Critical patent/JPS6130417B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Electrodes Of Semiconductors (AREA)
JP12754277A 1977-10-26 1977-10-26 Method of fabricating semiconductor Granted JPS5461465A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12754277A JPS5461465A (en) 1977-10-26 1977-10-26 Method of fabricating semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12754277A JPS5461465A (en) 1977-10-26 1977-10-26 Method of fabricating semiconductor

Publications (2)

Publication Number Publication Date
JPS5461465A true JPS5461465A (en) 1979-05-17
JPS6130417B2 JPS6130417B2 (enrdf_load_stackoverflow) 1986-07-14

Family

ID=14962576

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12754277A Granted JPS5461465A (en) 1977-10-26 1977-10-26 Method of fabricating semiconductor

Country Status (1)

Country Link
JP (1) JPS5461465A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56142654A (en) * 1980-04-09 1981-11-07 Toshiba Corp Manufacture of semiconductor device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0238314U (enrdf_load_stackoverflow) * 1988-09-08 1990-03-14

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56142654A (en) * 1980-04-09 1981-11-07 Toshiba Corp Manufacture of semiconductor device

Also Published As

Publication number Publication date
JPS6130417B2 (enrdf_load_stackoverflow) 1986-07-14

Similar Documents

Publication Publication Date Title
JPS5487175A (en) Method of fabricating semiconductor
JPS53148273A (en) Method of producing semiconductor
JPS542671A (en) Method of producing semiconductor
JPS5446485A (en) Method of producing semiconductor
JPS53128286A (en) Method of producing semiconductor
JPS53107287A (en) Method of producing semiconductor
SG57283G (en) Method of manufacturing semiconductor devices
JPS5427376A (en) Method of producing semiconductor
JPS546784A (en) Method of producing semiconductor
JPS53128273A (en) Method of producing semiconductor
JPS5489564A (en) Method of fabricating semiconductor
JPS5494885A (en) Method of fabricating ic semiconductor
JPS53138292A (en) Method of producing semiconductor
JPS5419677A (en) Method of producing semiconductor
JPS5422159A (en) Method of producing semiconductor
JPS5458375A (en) Method of producing semiconductor
JPS5491195A (en) Method of fabricating semiconductor device
JPS54109779A (en) Method of fabricating semiconductor
JPS548468A (en) Method of producing semiconductor
JPS5390776A (en) Method of producing semiconductor
JPS5394190A (en) Method of producing semiconductor
JPS5419358A (en) Method of producing semiconductor element
JPS5451388A (en) Method of producing semiconductor
JPS53124965A (en) Method of producing semiconductor
JPS5461488A (en) Method of fabricating semiconductor