JPS5459883A - Pattern printing apparatus - Google Patents

Pattern printing apparatus

Info

Publication number
JPS5459883A
JPS5459883A JP12415278A JP12415278A JPS5459883A JP S5459883 A JPS5459883 A JP S5459883A JP 12415278 A JP12415278 A JP 12415278A JP 12415278 A JP12415278 A JP 12415278A JP S5459883 A JPS5459883 A JP S5459883A
Authority
JP
Japan
Prior art keywords
axis
unit
laser light
length measuring
tables
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12415278A
Other languages
Japanese (ja)
Inventor
Yasuo Nakagawa
Yasuhiko Hara
Nobuyuki Akiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12415278A priority Critical patent/JPS5459883A/en
Publication of JPS5459883A publication Critical patent/JPS5459883A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To obtain unit interpattern spacings of arbitrary shapes with good accuracy by measuring printing position with a laser length measuring device simultaneously and making fine adjustment of displacements at the time of performing reduction projection exposure and printing on a dry plate with a variable aperture and a reduction projecting lens.
CONSTITUTION: The size and position information of the unit pattern of a recording medium are read with an input unit 5 and the command signals from there are applied to a numerical control unit 6. Next, motors 10, 14 for X-axis and Y-axis are operated by the position information out of these, thereby moving working tables 8 and 9 for X-axis and Y-axis by required amounts in biaxial directions. Thereafter, the laser light from a length measuring laser light source 45 is radiated and with a lens barrel 28 as a reference, the relative displacements of the tables 8 and 9 are measured with a length measuring interferometer 48. The signal corresponding to the displacement amount is applied to the unit 6 via laser light control circuit 49. Next, a motor 39 for X-axis and a motor for Y-axis (not illustrated) are controlled by the outputs thereof to move fine adjustment tables 18 and 37, thereby determining the position. After these, a variable aperture unit 17 is actuated by size information, whereby the required reduction is obtained
COPYRIGHT: (C)1979,JPO&Japio
JP12415278A 1978-10-11 1978-10-11 Pattern printing apparatus Pending JPS5459883A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12415278A JPS5459883A (en) 1978-10-11 1978-10-11 Pattern printing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12415278A JPS5459883A (en) 1978-10-11 1978-10-11 Pattern printing apparatus

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP11475975A Division JPS5239364A (en) 1975-09-25 1975-09-25 Apparatus for printing pattern for shadow mask on dry plate

Publications (1)

Publication Number Publication Date
JPS5459883A true JPS5459883A (en) 1979-05-14

Family

ID=14878216

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12415278A Pending JPS5459883A (en) 1978-10-11 1978-10-11 Pattern printing apparatus

Country Status (1)

Country Link
JP (1) JPS5459883A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5828748A (en) * 1981-08-13 1983-02-19 Nippon Kogaku Kk <Nikon> Positioning device for transcribing device
JPS62145730A (en) * 1985-12-19 1987-06-29 Nippon Kogaku Kk <Nikon> Projection type exposure apparatus
JPS62269315A (en) * 1986-05-19 1987-11-21 Canon Inc Device and method for exposure
JPS63158404A (en) * 1987-08-10 1988-07-01 Nikon Corp Position-aligning device in transfer apparatus
JPH0574680A (en) * 1992-03-13 1993-03-26 Hitachi Ltd Projection exposing method

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5019433A (en) * 1973-02-28 1975-02-28
JPS5022577A (en) * 1973-06-26 1975-03-11

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5019433A (en) * 1973-02-28 1975-02-28
JPS5022577A (en) * 1973-06-26 1975-03-11

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5828748A (en) * 1981-08-13 1983-02-19 Nippon Kogaku Kk <Nikon> Positioning device for transcribing device
JPS62145730A (en) * 1985-12-19 1987-06-29 Nippon Kogaku Kk <Nikon> Projection type exposure apparatus
JPS62269315A (en) * 1986-05-19 1987-11-21 Canon Inc Device and method for exposure
JPS63158404A (en) * 1987-08-10 1988-07-01 Nikon Corp Position-aligning device in transfer apparatus
JPH0410208B2 (en) * 1987-08-10 1992-02-24
JPH0574680A (en) * 1992-03-13 1993-03-26 Hitachi Ltd Projection exposing method

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