JPS5459046U - - Google Patents

Info

Publication number
JPS5459046U
JPS5459046U JP13077577U JP13077577U JPS5459046U JP S5459046 U JPS5459046 U JP S5459046U JP 13077577 U JP13077577 U JP 13077577U JP 13077577 U JP13077577 U JP 13077577U JP S5459046 U JPS5459046 U JP S5459046U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13077577U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13077577U priority Critical patent/JPS5459046U/ja
Publication of JPS5459046U publication Critical patent/JPS5459046U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP13077577U 1977-09-30 1977-09-30 Pending JPS5459046U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13077577U JPS5459046U (en) 1977-09-30 1977-09-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13077577U JPS5459046U (en) 1977-09-30 1977-09-30

Publications (1)

Publication Number Publication Date
JPS5459046U true JPS5459046U (en) 1979-04-24

Family

ID=29096720

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13077577U Pending JPS5459046U (en) 1977-09-30 1977-09-30

Country Status (1)

Country Link
JP (1) JPS5459046U (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51151685A (en) * 1975-06-18 1976-12-27 Philips Nv Method of forming thin layer by cathodic spattering process
JPS526378A (en) * 1975-07-04 1977-01-18 Matsushita Electric Ind Co Ltd Vessel for powder target

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51151685A (en) * 1975-06-18 1976-12-27 Philips Nv Method of forming thin layer by cathodic spattering process
JPS526378A (en) * 1975-07-04 1977-01-18 Matsushita Electric Ind Co Ltd Vessel for powder target

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