JPS5456391A - Thin-film making apparatus - Google Patents
Thin-film making apparatusInfo
- Publication number
- JPS5456391A JPS5456391A JP12239977A JP12239977A JPS5456391A JP S5456391 A JPS5456391 A JP S5456391A JP 12239977 A JP12239977 A JP 12239977A JP 12239977 A JP12239977 A JP 12239977A JP S5456391 A JPS5456391 A JP S5456391A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- shutter
- substrate
- target
- mesh
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
PURPOSE: To achieve the reduction in excess energies at the time when sputter particles arrive at substrate and obtain good quality thin-films by providing a mesh-form electrode having pores in opposition to a target electrode and letting the sputter particles deposit on the substrate.
CONSTITUTION: A mesh-form electrode 6 having pores of, e.g., #50 to #500 is opposedly provided to a target electrode 4 and a shutter 5 is interposed between the mesh electrode 6 and target electrode 4. A substrate 7 is mounted on the opposite side of the target electrode 4, with the meah electrode 6 as a boundary. First with the shutter 5 being held closed, discharge is caused bwtween the shutter 5 and target electrode 4, by which the deposits on the target surface are removed. After this, the shutter is opened and discharge is cused between the mesh electrode 6 and target electrode 4, by which sputtering for thin film production is accomplished. Thereby, the even and good quality thin film may be obtained on the substrate
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12239977A JPS5456391A (en) | 1977-10-14 | 1977-10-14 | Thin-film making apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12239977A JPS5456391A (en) | 1977-10-14 | 1977-10-14 | Thin-film making apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5456391A true JPS5456391A (en) | 1979-05-07 |
JPS5752955B2 JPS5752955B2 (en) | 1982-11-10 |
Family
ID=14834820
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12239977A Granted JPS5456391A (en) | 1977-10-14 | 1977-10-14 | Thin-film making apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5456391A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5597471A (en) * | 1979-01-20 | 1980-07-24 | Fujitsu General Ltd | Sputtering apparatus |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49120877A (en) * | 1973-03-20 | 1974-11-19 | ||
JPS5017945U (en) * | 1973-06-13 | 1975-02-27 |
-
1977
- 1977-10-14 JP JP12239977A patent/JPS5456391A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49120877A (en) * | 1973-03-20 | 1974-11-19 | ||
JPS5017945U (en) * | 1973-06-13 | 1975-02-27 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5597471A (en) * | 1979-01-20 | 1980-07-24 | Fujitsu General Ltd | Sputtering apparatus |
Also Published As
Publication number | Publication date |
---|---|
JPS5752955B2 (en) | 1982-11-10 |
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