JPS5450390A - Gas leak testing method - Google Patents

Gas leak testing method

Info

Publication number
JPS5450390A
JPS5450390A JP11652277A JP11652277A JPS5450390A JP S5450390 A JPS5450390 A JP S5450390A JP 11652277 A JP11652277 A JP 11652277A JP 11652277 A JP11652277 A JP 11652277A JP S5450390 A JPS5450390 A JP S5450390A
Authority
JP
Japan
Prior art keywords
gases
test
leak
probe
helium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11652277A
Other languages
English (en)
Inventor
Ichiro Wada
Takeo Tsuchiya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP11652277A priority Critical patent/JPS5450390A/ja
Publication of JPS5450390A publication Critical patent/JPS5450390A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Examining Or Testing Airtightness (AREA)
JP11652277A 1977-09-28 1977-09-28 Gas leak testing method Pending JPS5450390A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11652277A JPS5450390A (en) 1977-09-28 1977-09-28 Gas leak testing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11652277A JPS5450390A (en) 1977-09-28 1977-09-28 Gas leak testing method

Publications (1)

Publication Number Publication Date
JPS5450390A true JPS5450390A (en) 1979-04-20

Family

ID=14689209

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11652277A Pending JPS5450390A (en) 1977-09-28 1977-09-28 Gas leak testing method

Country Status (1)

Country Link
JP (1) JPS5450390A (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56143940A (en) * 1980-04-09 1981-11-10 Shimadzu Corp Leakage inspecting system
JPS5961738A (ja) * 1982-09-30 1984-04-09 Shimadzu Corp リ−クテスト装置
JPH10206272A (ja) * 1997-01-23 1998-08-07 Ulvac Japan Ltd 漏洩検知用磁場偏向型質量分析管の分解能向上方法
JP2018524600A (ja) * 2015-07-22 2018-08-30 レッドライン ディテクション エルエルシーＲｅｄｌｉｎｅ Ｄｅｔｅｃｔｉｏｎ，Ｌｌｃ 微小な漏れを検出するためのシステムおよび方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56143940A (en) * 1980-04-09 1981-11-10 Shimadzu Corp Leakage inspecting system
JPH0125412B2 (ja) * 1980-04-09 1989-05-17 Shimadzu Corp
JPS5961738A (ja) * 1982-09-30 1984-04-09 Shimadzu Corp リ−クテスト装置
JPH10206272A (ja) * 1997-01-23 1998-08-07 Ulvac Japan Ltd 漏洩検知用磁場偏向型質量分析管の分解能向上方法
JP2018524600A (ja) * 2015-07-22 2018-08-30 レッドライン ディテクション エルエルシーＲｅｄｌｉｎｅ Ｄｅｔｅｃｔｉｏｎ，Ｌｌｃ 微小な漏れを検出するためのシステムおよび方法

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