JPS5448476A - Automatic focussing unit for scanning type electronic microscope - Google Patents
Automatic focussing unit for scanning type electronic microscopeInfo
- Publication number
- JPS5448476A JPS5448476A JP11534677A JP11534677A JPS5448476A JP S5448476 A JPS5448476 A JP S5448476A JP 11534677 A JP11534677 A JP 11534677A JP 11534677 A JP11534677 A JP 11534677A JP S5448476 A JPS5448476 A JP S5448476A
- Authority
- JP
- Japan
- Prior art keywords
- controlling
- unit
- fed
- exciting current
- automatic focussing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To enable automatic focussing by making unnecessary manual operation for picture fog, by delaying the time until the factor changing the focus is made stable and by feeding the signal to start the unit to each unit after that.
CONSTITUTION: The signals from the means 15a controlling the beam accelerating voltage, means 15b controlling the working distance, means 15c controlling the collective current, means 15d controlling magnification, and means 15e controlling the sight are respectively fed to the pulse generating circuit 16 and they are detected. Next, the pulse signal from this circuit 16 is fed to the delay circuit 17 and it is delayed until the factor caused by controlling until each means is made stable. After that, these signals are fed to the automatic focussing unit 23 connected to the exciting current source 24. Thus, the focussing shifted with the control of the means can be corrected by flowing the exciting current caused in the exciting current source 24 into the objective lens
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11534677A JPS5448476A (en) | 1977-09-26 | 1977-09-26 | Automatic focussing unit for scanning type electronic microscope |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11534677A JPS5448476A (en) | 1977-09-26 | 1977-09-26 | Automatic focussing unit for scanning type electronic microscope |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5448476A true JPS5448476A (en) | 1979-04-17 |
Family
ID=14660248
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11534677A Pending JPS5448476A (en) | 1977-09-26 | 1977-09-26 | Automatic focussing unit for scanning type electronic microscope |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5448476A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0282442A (en) * | 1988-09-19 | 1990-03-23 | Nissin High Voltage Co Ltd | Microbeam generator |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5234340A (en) * | 1975-09-12 | 1977-03-16 | Hitachi Ltd | Coded grounding system for wire-breaking detection |
-
1977
- 1977-09-26 JP JP11534677A patent/JPS5448476A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5234340A (en) * | 1975-09-12 | 1977-03-16 | Hitachi Ltd | Coded grounding system for wire-breaking detection |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0282442A (en) * | 1988-09-19 | 1990-03-23 | Nissin High Voltage Co Ltd | Microbeam generator |
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