JPS5448476A - Automatic focussing unit for scanning type electronic microscope - Google Patents

Automatic focussing unit for scanning type electronic microscope

Info

Publication number
JPS5448476A
JPS5448476A JP11534677A JP11534677A JPS5448476A JP S5448476 A JPS5448476 A JP S5448476A JP 11534677 A JP11534677 A JP 11534677A JP 11534677 A JP11534677 A JP 11534677A JP S5448476 A JPS5448476 A JP S5448476A
Authority
JP
Japan
Prior art keywords
controlling
unit
fed
exciting current
automatic focussing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11534677A
Other languages
Japanese (ja)
Inventor
Takao Namae
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP11534677A priority Critical patent/JPS5448476A/en
Publication of JPS5448476A publication Critical patent/JPS5448476A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To enable automatic focussing by making unnecessary manual operation for picture fog, by delaying the time until the factor changing the focus is made stable and by feeding the signal to start the unit to each unit after that.
CONSTITUTION: The signals from the means 15a controlling the beam accelerating voltage, means 15b controlling the working distance, means 15c controlling the collective current, means 15d controlling magnification, and means 15e controlling the sight are respectively fed to the pulse generating circuit 16 and they are detected. Next, the pulse signal from this circuit 16 is fed to the delay circuit 17 and it is delayed until the factor caused by controlling until each means is made stable. After that, these signals are fed to the automatic focussing unit 23 connected to the exciting current source 24. Thus, the focussing shifted with the control of the means can be corrected by flowing the exciting current caused in the exciting current source 24 into the objective lens
COPYRIGHT: (C)1979,JPO&Japio
JP11534677A 1977-09-26 1977-09-26 Automatic focussing unit for scanning type electronic microscope Pending JPS5448476A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11534677A JPS5448476A (en) 1977-09-26 1977-09-26 Automatic focussing unit for scanning type electronic microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11534677A JPS5448476A (en) 1977-09-26 1977-09-26 Automatic focussing unit for scanning type electronic microscope

Publications (1)

Publication Number Publication Date
JPS5448476A true JPS5448476A (en) 1979-04-17

Family

ID=14660248

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11534677A Pending JPS5448476A (en) 1977-09-26 1977-09-26 Automatic focussing unit for scanning type electronic microscope

Country Status (1)

Country Link
JP (1) JPS5448476A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0282442A (en) * 1988-09-19 1990-03-23 Nissin High Voltage Co Ltd Microbeam generator

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5234340A (en) * 1975-09-12 1977-03-16 Hitachi Ltd Coded grounding system for wire-breaking detection

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5234340A (en) * 1975-09-12 1977-03-16 Hitachi Ltd Coded grounding system for wire-breaking detection

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0282442A (en) * 1988-09-19 1990-03-23 Nissin High Voltage Co Ltd Microbeam generator

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