JPS5444589A - Glow discharger and using method of the same - Google Patents

Glow discharger and using method of the same

Info

Publication number
JPS5444589A
JPS5444589A JP11054377A JP11054377A JPS5444589A JP S5444589 A JPS5444589 A JP S5444589A JP 11054377 A JP11054377 A JP 11054377A JP 11054377 A JP11054377 A JP 11054377A JP S5444589 A JPS5444589 A JP S5444589A
Authority
JP
Japan
Prior art keywords
anode
electrode
discharging
sample
glow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11054377A
Other languages
Japanese (ja)
Inventor
Konosuke Oishi
Zenji Ohashi
Yoji Arai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JFE Steel Corp
Hitachi Ltd
Original Assignee
Hitachi Ltd
Kawasaki Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Kawasaki Steel Corp filed Critical Hitachi Ltd
Priority to JP11054377A priority Critical patent/JPS5444589A/en
Publication of JPS5444589A publication Critical patent/JPS5444589A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/66—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence
    • G01N21/67—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence using electric arcs or discharges

Landscapes

  • Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Investigating And Analyzing Materials By Characteristic Methods (AREA)

Abstract

PURPOSE:To reduce the short time current at the glow discharge start and make possible the analysis of shallow layers by providing an electrically insulated third electrode to cathode and anode and providing a second power source applying voltage between the anode and the third electrode. CONSTITUTION:An auxiliary electrode 5 being a third electrode insulated by an insulation tube 6 is inserted into a discharge tube from the side face of anode 8. The light end of the electrode 5 is bent and is directed to the left side analyzing sample 1 of the anode 8. Discharging power sources 11, 12 ar prepared and the voltages therefrom are applied between the analysing sample 1 and anode 8 and between the anode 8 and electrode 5. Discharging is first performed between the electrode 5 and anode 8 to generate electrons or ions, following to which discharging between the sample 1 and anode 8 is started. Here, charged particles exist in the state where no electric fields are applied and therefore high voltages are not particularly required for the purpose of performing elctrolytic dissociation. It becomes possible to analyze the shallow layers of the analyzing sample through glow discharging and the depth having been dug by sputtering may be accurately obtained.
JP11054377A 1977-09-16 1977-09-16 Glow discharger and using method of the same Pending JPS5444589A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11054377A JPS5444589A (en) 1977-09-16 1977-09-16 Glow discharger and using method of the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11054377A JPS5444589A (en) 1977-09-16 1977-09-16 Glow discharger and using method of the same

Publications (1)

Publication Number Publication Date
JPS5444589A true JPS5444589A (en) 1979-04-09

Family

ID=14538477

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11054377A Pending JPS5444589A (en) 1977-09-16 1977-09-16 Glow discharger and using method of the same

Country Status (1)

Country Link
JP (1) JPS5444589A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0448061A2 (en) * 1990-03-19 1991-09-25 Kawasaki Steel Corporation Glow discharge atomic emission spectroscopy and apparatus thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0448061A2 (en) * 1990-03-19 1991-09-25 Kawasaki Steel Corporation Glow discharge atomic emission spectroscopy and apparatus thereof

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