JPS544399A - Piezoelectric crystal film of zinc oxide - Google Patents
Piezoelectric crystal film of zinc oxideInfo
- Publication number
- JPS544399A JPS544399A JP7015077A JP7015077A JPS544399A JP S544399 A JPS544399 A JP S544399A JP 7015077 A JP7015077 A JP 7015077A JP 7015077 A JP7015077 A JP 7015077A JP S544399 A JPS544399 A JP S544399A
- Authority
- JP
- Japan
- Prior art keywords
- zinc oxide
- crystal film
- piezoelectric crystal
- piezoelectric
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 title 2
- 239000013078 crystal Substances 0.000 title 1
- 239000011787 zinc oxide Substances 0.000 title 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Compositions Of Oxide Ceramics (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7015077A JPS544399A (en) | 1977-06-13 | 1977-06-13 | Piezoelectric crystal film of zinc oxide |
DE2825083A DE2825083C2 (de) | 1977-06-09 | 1978-06-08 | Piezoelektrischer kristalliner Film |
US05/913,803 US4182793A (en) | 1977-06-09 | 1978-06-08 | Piezoelectric crystalline film of zinc oxide |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7015077A JPS544399A (en) | 1977-06-13 | 1977-06-13 | Piezoelectric crystal film of zinc oxide |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS544399A true JPS544399A (en) | 1979-01-13 |
JPS5746229B2 JPS5746229B2 (ja) | 1982-10-01 |
Family
ID=13423253
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7015077A Granted JPS544399A (en) | 1977-06-09 | 1977-06-13 | Piezoelectric crystal film of zinc oxide |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS544399A (ja) |
-
1977
- 1977-06-13 JP JP7015077A patent/JPS544399A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5746229B2 (ja) | 1982-10-01 |
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