JPS5443458A - Automatic focusing device of electronic scan microscope - Google Patents

Automatic focusing device of electronic scan microscope

Info

Publication number
JPS5443458A
JPS5443458A JP10969777A JP10969777A JPS5443458A JP S5443458 A JPS5443458 A JP S5443458A JP 10969777 A JP10969777 A JP 10969777A JP 10969777 A JP10969777 A JP 10969777A JP S5443458 A JPS5443458 A JP S5443458A
Authority
JP
Japan
Prior art keywords
scanning speed
automatic focusing
given
focusing device
optimum state
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10969777A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5757816B2 (enrdf_load_stackoverflow
Inventor
Takao Namae
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP10969777A priority Critical patent/JPS5443458A/ja
Publication of JPS5443458A publication Critical patent/JPS5443458A/ja
Publication of JPS5757816B2 publication Critical patent/JPS5757816B2/ja
Granted legal-status Critical Current

Links

JP10969777A 1977-09-12 1977-09-12 Automatic focusing device of electronic scan microscope Granted JPS5443458A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10969777A JPS5443458A (en) 1977-09-12 1977-09-12 Automatic focusing device of electronic scan microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10969777A JPS5443458A (en) 1977-09-12 1977-09-12 Automatic focusing device of electronic scan microscope

Publications (2)

Publication Number Publication Date
JPS5443458A true JPS5443458A (en) 1979-04-06
JPS5757816B2 JPS5757816B2 (enrdf_load_stackoverflow) 1982-12-07

Family

ID=14516902

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10969777A Granted JPS5443458A (en) 1977-09-12 1977-09-12 Automatic focusing device of electronic scan microscope

Country Status (1)

Country Link
JP (1) JPS5443458A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57168459A (en) * 1981-04-10 1982-10-16 Hitachi Ltd Scanning electron microscope and similar device
EP1632980A3 (en) * 2004-09-03 2008-07-23 Carl Zeiss SMT Limited Scanning particle beam instrument

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0316912U (enrdf_load_stackoverflow) * 1989-06-30 1991-02-20

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57168459A (en) * 1981-04-10 1982-10-16 Hitachi Ltd Scanning electron microscope and similar device
EP1632980A3 (en) * 2004-09-03 2008-07-23 Carl Zeiss SMT Limited Scanning particle beam instrument

Also Published As

Publication number Publication date
JPS5757816B2 (enrdf_load_stackoverflow) 1982-12-07

Similar Documents

Publication Publication Date Title
JPS5220021A (en) Exposure control device for the camera
JPS5443458A (en) Automatic focusing device of electronic scan microscope
JPS5344021A (en) Safety means for automatic focusing device
JPS5248910A (en) Itv camera automatic selection switch equipment
JPS5423056A (en) Automatic soldering device
JPS53131834A (en) Shutter release device for small camera
JPS5422128A (en) Terminal device for data transmission
JPS53114663A (en) Lens current setting unit for electronic microscope
JPS5436929A (en) Camera with automatic focus device
JPS5333521A (en) Monitor device for moving object
JPS51147967A (en) Method of controlling spot exposure
JPS5269519A (en) Program control unit
JPS53100846A (en) Automatic focusing device
JPS537893A (en) Apparatus for switching automatically and manually
JPS53101414A (en) Electronic musical instrument
JPS5461523A (en) Automatic focusing device
JPS5644912A (en) Device for tracing pattern and obtaining position information
JPS53108423A (en) Manual iris-out device for camera
JPS53131007A (en) Automatic focusing device
JPS5527686A (en) Projection eliminating device
JPS53118305A (en) Automatic editing device
JPS51138282A (en) Automatic control method and device
JPS5394245A (en) Controlling device for melting of solder
JPS54111274A (en) Scanning electron microscope
JPS5518934A (en) Mixed sweep generating circuit