JPS53100846A - Automatic focusing device - Google Patents

Automatic focusing device

Info

Publication number
JPS53100846A
JPS53100846A JP1498777A JP1498777A JPS53100846A JP S53100846 A JPS53100846 A JP S53100846A JP 1498777 A JP1498777 A JP 1498777A JP 1498777 A JP1498777 A JP 1498777A JP S53100846 A JPS53100846 A JP S53100846A
Authority
JP
Japan
Prior art keywords
automatic focusing
focusing device
microscope
detector
camera
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1498777A
Other languages
Japanese (ja)
Other versions
JPS626204B2 (en
Inventor
Yoshihiro Shima
Takafumi Miyatake
Seiji Kashioka
Masakazu Ejiri
Yoshikazu Suzumura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1498777A priority Critical patent/JPS53100846A/en
Publication of JPS53100846A publication Critical patent/JPS53100846A/en
Publication of JPS626204B2 publication Critical patent/JPS626204B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To automatically accomplish the focusing operation of an image pick-up device such as a microscope by using a TV camera as a detector for a sample having a preset pattern.
COPYRIGHT: (C)1978,JPO&Japio
JP1498777A 1977-02-16 1977-02-16 Automatic focusing device Granted JPS53100846A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1498777A JPS53100846A (en) 1977-02-16 1977-02-16 Automatic focusing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1498777A JPS53100846A (en) 1977-02-16 1977-02-16 Automatic focusing device

Publications (2)

Publication Number Publication Date
JPS53100846A true JPS53100846A (en) 1978-09-02
JPS626204B2 JPS626204B2 (en) 1987-02-09

Family

ID=11876289

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1498777A Granted JPS53100846A (en) 1977-02-16 1977-02-16 Automatic focusing device

Country Status (1)

Country Link
JP (1) JPS53100846A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63286702A (en) * 1987-05-20 1988-11-24 Toyo Seikan Kaisha Ltd Method for measuring residual thickness of groove

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63286702A (en) * 1987-05-20 1988-11-24 Toyo Seikan Kaisha Ltd Method for measuring residual thickness of groove

Also Published As

Publication number Publication date
JPS626204B2 (en) 1987-02-09

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