JPS5442585B2 - - Google Patents
Info
- Publication number
- JPS5442585B2 JPS5442585B2 JP13705977A JP13705977A JPS5442585B2 JP S5442585 B2 JPS5442585 B2 JP S5442585B2 JP 13705977 A JP13705977 A JP 13705977A JP 13705977 A JP13705977 A JP 13705977A JP S5442585 B2 JPS5442585 B2 JP S5442585B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13705977A JPS53108278A (en) | 1977-11-14 | 1977-11-14 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13705977A JPS53108278A (en) | 1977-11-14 | 1977-11-14 | Manufacture of semiconductor device |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP725973A Division JPS5317393B2 (de) | 1973-01-16 | 1973-01-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS53108278A JPS53108278A (en) | 1978-09-20 |
| JPS5442585B2 true JPS5442585B2 (de) | 1979-12-14 |
Family
ID=15189919
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13705977A Granted JPS53108278A (en) | 1977-11-14 | 1977-11-14 | Manufacture of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS53108278A (de) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004335899A (ja) * | 2003-05-09 | 2004-11-25 | Denso Corp | 炭化珪素半導体装置の製造方法 |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3567509A (en) * | 1965-07-22 | 1971-03-02 | Ibm | Metal-insulator films for semiconductor devices |
| JPS4841070A (de) * | 1971-09-27 | 1973-06-16 | ||
| JPS4847772A (de) * | 1971-10-13 | 1973-07-06 | ||
| JPS4973083A (de) * | 1972-11-13 | 1974-07-15 | ||
| JPS511586A (ja) * | 1974-06-26 | 1976-01-08 | Toyo Kogyo Co | Kariugomutokinzokutono setsuchakuhoho |
| JPS5441871A (en) * | 1977-08-26 | 1979-04-03 | Delalande Sa | Novel 55hydroxymethyloxazolidinons and its manufacture |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4924171U (de) * | 1972-05-31 | 1974-03-01 |
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1977
- 1977-11-14 JP JP13705977A patent/JPS53108278A/ja active Granted
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3567509A (en) * | 1965-07-22 | 1971-03-02 | Ibm | Metal-insulator films for semiconductor devices |
| JPS4841070A (de) * | 1971-09-27 | 1973-06-16 | ||
| JPS4847772A (de) * | 1971-10-13 | 1973-07-06 | ||
| JPS4973083A (de) * | 1972-11-13 | 1974-07-15 | ||
| JPS511586A (ja) * | 1974-06-26 | 1976-01-08 | Toyo Kogyo Co | Kariugomutokinzokutono setsuchakuhoho |
| JPS5441871A (en) * | 1977-08-26 | 1979-04-03 | Delalande Sa | Novel 55hydroxymethyloxazolidinons and its manufacture |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS53108278A (en) | 1978-09-20 |