JPS5441207B2 - - Google Patents

Info

Publication number
JPS5441207B2
JPS5441207B2 JP8090772A JP8090772A JPS5441207B2 JP S5441207 B2 JPS5441207 B2 JP S5441207B2 JP 8090772 A JP8090772 A JP 8090772A JP 8090772 A JP8090772 A JP 8090772A JP S5441207 B2 JPS5441207 B2 JP S5441207B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8090772A
Other languages
Japanese (ja)
Other versions
JPS4939421A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8090772A priority Critical patent/JPS5441207B2/ja
Publication of JPS4939421A publication Critical patent/JPS4939421A/ja
Publication of JPS5441207B2 publication Critical patent/JPS5441207B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electrophotography Using Other Than Carlson'S Method (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Electron Beam Exposure (AREA)
JP8090772A 1972-08-12 1972-08-12 Expired JPS5441207B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8090772A JPS5441207B2 (enrdf_load_stackoverflow) 1972-08-12 1972-08-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8090772A JPS5441207B2 (enrdf_load_stackoverflow) 1972-08-12 1972-08-12

Publications (2)

Publication Number Publication Date
JPS4939421A JPS4939421A (enrdf_load_stackoverflow) 1974-04-12
JPS5441207B2 true JPS5441207B2 (enrdf_load_stackoverflow) 1979-12-07

Family

ID=13731435

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8090772A Expired JPS5441207B2 (enrdf_load_stackoverflow) 1972-08-12 1972-08-12

Country Status (1)

Country Link
JP (1) JPS5441207B2 (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4011351A (en) * 1975-01-29 1977-03-08 International Business Machines Corporation Preparation of resist image with methacrylate polymers
JPS5934296B2 (ja) * 1976-06-16 1984-08-21 松下電器産業株式会社 電子ビ−ムレジストおよびその使用方法
JPS59192211A (ja) * 1983-04-15 1984-10-31 Olympus Optical Co Ltd レンズ保持装置
JPS60239704A (ja) * 1984-05-14 1985-11-28 Olympus Optical Co Ltd 鏡組における光学素子の装入方法

Also Published As

Publication number Publication date
JPS4939421A (enrdf_load_stackoverflow) 1974-04-12

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