JPS5439908B2 - - Google Patents
Info
- Publication number
- JPS5439908B2 JPS5439908B2 JP12273773A JP12273773A JPS5439908B2 JP S5439908 B2 JPS5439908 B2 JP S5439908B2 JP 12273773 A JP12273773 A JP 12273773A JP 12273773 A JP12273773 A JP 12273773A JP S5439908 B2 JPS5439908 B2 JP S5439908B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12273773A JPS5439908B2 (en:Method) | 1973-11-02 | 1973-11-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12273773A JPS5439908B2 (en:Method) | 1973-11-02 | 1973-11-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5073174A JPS5073174A (en:Method) | 1975-06-17 |
| JPS5439908B2 true JPS5439908B2 (en:Method) | 1979-11-30 |
Family
ID=14843332
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12273773A Expired JPS5439908B2 (en:Method) | 1973-11-02 | 1973-11-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5439908B2 (en:Method) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5632484U (en:Method) * | 1979-08-22 | 1981-03-30 | ||
| JPS6246520A (ja) * | 1985-08-23 | 1987-02-28 | Mitsubishi Electric Corp | 露光装置 |
| JPS63144635U (en:Method) * | 1987-03-13 | 1988-09-22 |
-
1973
- 1973-11-02 JP JP12273773A patent/JPS5439908B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5073174A (en:Method) | 1975-06-17 |