JPS63144635U - - Google Patents
Info
- Publication number
- JPS63144635U JPS63144635U JP1987035838U JP3583887U JPS63144635U JP S63144635 U JPS63144635 U JP S63144635U JP 1987035838 U JP1987035838 U JP 1987035838U JP 3583887 U JP3583887 U JP 3583887U JP S63144635 U JPS63144635 U JP S63144635U
- Authority
- JP
- Japan
- Prior art keywords
- frame
- reticle
- mounting
- confirmation signal
- screen frame
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001105 regulatory effect Effects 0.000 claims description 6
- 238000012790 confirmation Methods 0.000 claims description 4
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987035838U JPS63144635U (en:Method) | 1987-03-13 | 1987-03-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987035838U JPS63144635U (en:Method) | 1987-03-13 | 1987-03-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63144635U true JPS63144635U (en:Method) | 1988-09-22 |
Family
ID=30845689
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987035838U Pending JPS63144635U (en:Method) | 1987-03-13 | 1987-03-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63144635U (en:Method) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5073174A (en:Method) * | 1973-11-02 | 1975-06-17 | ||
| JPS584150A (ja) * | 1981-06-30 | 1983-01-11 | Fujitsu Ltd | 露光装置 |
-
1987
- 1987-03-13 JP JP1987035838U patent/JPS63144635U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5073174A (en:Method) * | 1973-11-02 | 1975-06-17 | ||
| JPS584150A (ja) * | 1981-06-30 | 1983-01-11 | Fujitsu Ltd | 露光装置 |