JPS5437831B2 - - Google Patents
Info
- Publication number
- JPS5437831B2 JPS5437831B2 JP11751774A JP11751774A JPS5437831B2 JP S5437831 B2 JPS5437831 B2 JP S5437831B2 JP 11751774 A JP11751774 A JP 11751774A JP 11751774 A JP11751774 A JP 11751774A JP S5437831 B2 JPS5437831 B2 JP S5437831B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11751774A JPS5143958A (en) | 1974-10-12 | 1974-10-12 | Pataanno ketsukankensahoho |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11751774A JPS5143958A (en) | 1974-10-12 | 1974-10-12 | Pataanno ketsukankensahoho |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5143958A JPS5143958A (en) | 1976-04-15 |
| JPS5437831B2 true JPS5437831B2 (enExample) | 1979-11-17 |
Family
ID=14713714
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11751774A Granted JPS5143958A (en) | 1974-10-12 | 1974-10-12 | Pataanno ketsukankensahoho |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5143958A (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51110237A (enExample) * | 1975-03-25 | 1976-09-29 | Kogyo Gijutsuin | |
| JPS5249770A (en) * | 1975-10-20 | 1977-04-21 | Toshiba Corp | Pattern inspection device |
| JPS5652636A (en) * | 1979-10-03 | 1981-05-11 | Nissan Motor Co Ltd | Tapered leaf spring |
| JPS5740926A (en) * | 1980-08-26 | 1982-03-06 | Nec Corp | Device for projection and exposure |
| JPS57170532A (en) * | 1981-04-13 | 1982-10-20 | Fujitsu Ltd | Inspecting method for mask |
-
1974
- 1974-10-12 JP JP11751774A patent/JPS5143958A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5143958A (en) | 1976-04-15 |