JPS5143958A - Pataanno ketsukankensahoho - Google Patents

Pataanno ketsukankensahoho

Info

Publication number
JPS5143958A
JPS5143958A JP11751774A JP11751774A JPS5143958A JP S5143958 A JPS5143958 A JP S5143958A JP 11751774 A JP11751774 A JP 11751774A JP 11751774 A JP11751774 A JP 11751774A JP S5143958 A JPS5143958 A JP S5143958A
Authority
JP
Japan
Prior art keywords
pataanno
ketsukankensahoho
pataanno ketsukankensahoho
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11751774A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5437831B2 (enExample
Inventor
Yasushi Uchama
Daikichi Awamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIPPON JIDO SEIGYO KK
Original Assignee
NIPPON JIDO SEIGYO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIPPON JIDO SEIGYO KK filed Critical NIPPON JIDO SEIGYO KK
Priority to JP11751774A priority Critical patent/JPS5143958A/ja
Publication of JPS5143958A publication Critical patent/JPS5143958A/ja
Publication of JPS5437831B2 publication Critical patent/JPS5437831B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP11751774A 1974-10-12 1974-10-12 Pataanno ketsukankensahoho Granted JPS5143958A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11751774A JPS5143958A (en) 1974-10-12 1974-10-12 Pataanno ketsukankensahoho

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11751774A JPS5143958A (en) 1974-10-12 1974-10-12 Pataanno ketsukankensahoho

Publications (2)

Publication Number Publication Date
JPS5143958A true JPS5143958A (en) 1976-04-15
JPS5437831B2 JPS5437831B2 (enExample) 1979-11-17

Family

ID=14713714

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11751774A Granted JPS5143958A (en) 1974-10-12 1974-10-12 Pataanno ketsukankensahoho

Country Status (1)

Country Link
JP (1) JPS5143958A (enExample)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51110237A (enExample) * 1975-03-25 1976-09-29 Kogyo Gijutsuin
JPS5249770A (en) * 1975-10-20 1977-04-21 Toshiba Corp Pattern inspection device
JPS5652636A (en) * 1979-10-03 1981-05-11 Nissan Motor Co Ltd Tapered leaf spring
JPS5740926A (en) * 1980-08-26 1982-03-06 Nec Corp Device for projection and exposure
JPS57170532A (en) * 1981-04-13 1982-10-20 Fujitsu Ltd Inspecting method for mask

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51110237A (enExample) * 1975-03-25 1976-09-29 Kogyo Gijutsuin
JPS5249770A (en) * 1975-10-20 1977-04-21 Toshiba Corp Pattern inspection device
JPS5652636A (en) * 1979-10-03 1981-05-11 Nissan Motor Co Ltd Tapered leaf spring
JPS5740926A (en) * 1980-08-26 1982-03-06 Nec Corp Device for projection and exposure
JPS57170532A (en) * 1981-04-13 1982-10-20 Fujitsu Ltd Inspecting method for mask

Also Published As

Publication number Publication date
JPS5437831B2 (enExample) 1979-11-17

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