JPS543699A - Protector of ion source - Google Patents
Protector of ion sourceInfo
- Publication number
- JPS543699A JPS543699A JP6673477A JP6673477A JPS543699A JP S543699 A JPS543699 A JP S543699A JP 6673477 A JP6673477 A JP 6673477A JP 6673477 A JP6673477 A JP 6673477A JP S543699 A JPS543699 A JP S543699A
- Authority
- JP
- Japan
- Prior art keywords
- protector
- ion source
- acceleration electrode
- arc
- extinct
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6673477A JPS543699A (en) | 1977-06-08 | 1977-06-08 | Protector of ion source |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6673477A JPS543699A (en) | 1977-06-08 | 1977-06-08 | Protector of ion source |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS543699A true JPS543699A (en) | 1979-01-11 |
Family
ID=13324401
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6673477A Pending JPS543699A (en) | 1977-06-08 | 1977-06-08 | Protector of ion source |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS543699A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4929294A (en) * | 1986-08-23 | 1990-05-29 | Blome GmbH & Co. Kommanditgesellschaft, and Strabag Bau-Aktiengesellschaf t | Method of creating profiling projections on plastic-covered steel parts |
JP2001216935A (ja) * | 1999-12-20 | 2001-08-10 | Axcelis Technologies Inc | イオン注入装置およびそのための電源を補強する方法 |
-
1977
- 1977-06-08 JP JP6673477A patent/JPS543699A/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4929294A (en) * | 1986-08-23 | 1990-05-29 | Blome GmbH & Co. Kommanditgesellschaft, and Strabag Bau-Aktiengesellschaf t | Method of creating profiling projections on plastic-covered steel parts |
JP2001216935A (ja) * | 1999-12-20 | 2001-08-10 | Axcelis Technologies Inc | イオン注入装置およびそのための電源を補強する方法 |
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