JPS5435061B1 - - Google Patents

Info

Publication number
JPS5435061B1
JPS5435061B1 JP6695571A JP6695571A JPS5435061B1 JP S5435061 B1 JPS5435061 B1 JP S5435061B1 JP 6695571 A JP6695571 A JP 6695571A JP 6695571 A JP6695571 A JP 6695571A JP S5435061 B1 JPS5435061 B1 JP S5435061B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6695571A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5435061B1 publication Critical patent/JPS5435061B1/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2441—Semiconductor detectors, e.g. diodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2446—Position sensitive detectors
    • H01J2237/24465—Sectored detectors, e.g. quadrants
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2449—Detector devices with moving charges in electric or magnetic fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24571—Measurements of non-electric or non-magnetic variables
    • H01J2237/24585—Other variables, e.g. energy, mass, velocity, time, temperature

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP6695571A 1970-08-31 1971-08-31 Pending JPS5435061B1 (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19702043749 DE2043749C3 (de) 1970-08-31 1970-08-31 Raster-Korpuskularstrahlmikroskop

Publications (1)

Publication Number Publication Date
JPS5435061B1 true JPS5435061B1 (enrdf_load_stackoverflow) 1979-10-31

Family

ID=5781510

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6695571A Pending JPS5435061B1 (enrdf_load_stackoverflow) 1970-08-31 1971-08-31

Country Status (4)

Country Link
JP (1) JPS5435061B1 (enrdf_load_stackoverflow)
DE (1) DE2043749C3 (enrdf_load_stackoverflow)
GB (1) GB1328713A (enrdf_load_stackoverflow)
NL (1) NL7111783A (enrdf_load_stackoverflow)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3987276B2 (ja) * 2000-10-12 2007-10-03 株式会社日立製作所 試料像形成方法
JP2007207764A (ja) * 2007-02-26 2007-08-16 Hitachi Ltd 走査形荷電粒子顕微鏡
ITBO20070409A1 (it) * 2007-06-11 2008-12-12 C N R Consiglio Naz Delle Ri C Dispositivo rivelatore per microscopio elettronico.
DE102009016861A1 (de) 2009-04-08 2010-10-21 Carl Zeiss Nts Gmbh Teilchenstrahlmikroskop
JP5208910B2 (ja) * 2009-12-07 2013-06-12 株式会社日立ハイテクノロジーズ 透過型電子顕微鏡及び試料観察方法
DK2823504T3 (en) * 2012-03-06 2018-11-05 Scienta Omicron Ab PARTICLE SPECTROMETER ANALYSIS DEVICE
DE102012007868A1 (de) * 2012-04-19 2013-10-24 Carl Zeiss Microscopy Gmbh Transmissionselektronenmikroskopiesystem

Also Published As

Publication number Publication date
DE2043749C3 (de) 1975-08-21
NL7111783A (enrdf_load_stackoverflow) 1972-03-02
GB1328713A (en) 1973-08-30
DE2043749A1 (de) 1972-03-02
DE2043749B2 (de) 1975-01-09

Similar Documents

Publication Publication Date Title
FR2084007A5 (enrdf_load_stackoverflow)
AR204384A1 (enrdf_load_stackoverflow)
ATA96471A (enrdf_load_stackoverflow)
AU2044470A (enrdf_load_stackoverflow)
AU1146470A (enrdf_load_stackoverflow)
AU1473870A (enrdf_load_stackoverflow)
AU2085370A (enrdf_load_stackoverflow)
AU1336970A (enrdf_load_stackoverflow)
AU2017870A (enrdf_load_stackoverflow)
AU1833270A (enrdf_load_stackoverflow)
AU1716970A (enrdf_load_stackoverflow)
AU2130570A (enrdf_load_stackoverflow)
AU1517670A (enrdf_load_stackoverflow)
AU1326870A (enrdf_load_stackoverflow)
AU1591370A (enrdf_load_stackoverflow)
AU1841070A (enrdf_load_stackoverflow)
AU1328670A (enrdf_load_stackoverflow)
AU1343870A (enrdf_load_stackoverflow)
AU1277070A (enrdf_load_stackoverflow)
AU2144270A (enrdf_load_stackoverflow)
AU2131570A (enrdf_load_stackoverflow)
AU2130770A (enrdf_load_stackoverflow)
AU1247570A (enrdf_load_stackoverflow)
AU1581370A (enrdf_load_stackoverflow)
AU1235770A (enrdf_load_stackoverflow)