JPS5434754A - Ion implanting method - Google Patents

Ion implanting method

Info

Publication number
JPS5434754A
JPS5434754A JP10138377A JP10138377A JPS5434754A JP S5434754 A JPS5434754 A JP S5434754A JP 10138377 A JP10138377 A JP 10138377A JP 10138377 A JP10138377 A JP 10138377A JP S5434754 A JPS5434754 A JP S5434754A
Authority
JP
Japan
Prior art keywords
ion implanting
implanting method
uniforming
specially
scan
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10138377A
Other languages
Japanese (ja)
Other versions
JPS6124814B2 (en
Inventor
Kunihiro Yagi
Masao Tamura
Kiyoshi Miyake
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10138377A priority Critical patent/JPS5434754A/en
Publication of JPS5434754A publication Critical patent/JPS5434754A/en
Publication of JPS6124814B2 publication Critical patent/JPS6124814B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE:To make electrical characteristics uniform specially on a large-current ion implantation device, by uniforming the defect distribution by reducing thermal distortion without any scan.
JP10138377A 1977-08-24 1977-08-24 Ion implanting method Granted JPS5434754A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10138377A JPS5434754A (en) 1977-08-24 1977-08-24 Ion implanting method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10138377A JPS5434754A (en) 1977-08-24 1977-08-24 Ion implanting method

Publications (2)

Publication Number Publication Date
JPS5434754A true JPS5434754A (en) 1979-03-14
JPS6124814B2 JPS6124814B2 (en) 1986-06-12

Family

ID=14299239

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10138377A Granted JPS5434754A (en) 1977-08-24 1977-08-24 Ion implanting method

Country Status (1)

Country Link
JP (1) JPS5434754A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56122127A (en) * 1980-02-01 1981-09-25 Commissariat Energie Atomique Method of doping semiconductor at high speed

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56122127A (en) * 1980-02-01 1981-09-25 Commissariat Energie Atomique Method of doping semiconductor at high speed

Also Published As

Publication number Publication date
JPS6124814B2 (en) 1986-06-12

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