JPS5434347B1 - - Google Patents

Info

Publication number
JPS5434347B1
JPS5434347B1 JP6414472A JP6414472A JPS5434347B1 JP S5434347 B1 JPS5434347 B1 JP S5434347B1 JP 6414472 A JP6414472 A JP 6414472A JP 6414472 A JP6414472 A JP 6414472A JP S5434347 B1 JPS5434347 B1 JP S5434347B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6414472A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5434347B1 publication Critical patent/JPS5434347B1/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02067—Active error reduction, i.e. varying with time by electronic control systems, i.e. using feedback acting on optics or light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02067—Active error reduction, i.e. varying with time by electronic control systems, i.e. using feedback acting on optics or light
    • G01B9/02068—Auto-alignment of optical elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Holo Graphy (AREA)
JP6414472A 1971-07-07 1972-06-28 Pending JPS5434347B1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19712133687 DE2133687A1 (de) 1971-07-07 1971-07-07 Anordnung zur stabilisierung der optischen weglaengendifferenz

Publications (1)

Publication Number Publication Date
JPS5434347B1 true JPS5434347B1 (ja) 1979-10-26

Family

ID=5812868

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6414472A Pending JPS5434347B1 (ja) 1971-07-07 1972-06-28

Country Status (4)

Country Link
JP (1) JPS5434347B1 (ja)
DE (1) DE2133687A1 (ja)
FR (1) FR2145345A5 (ja)
GB (1) GB1392395A (ja)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2634210C2 (de) * 1976-07-30 1986-06-05 United Kingdom Atomic Energy Authority, London Interferometer
DE3404963C2 (de) * 1984-02-11 1986-09-25 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 8000 München Laser-Interferometer zur Längenmessung
DE4108062A1 (de) * 1991-03-13 1992-09-17 Man Technologie Gmbh Vorrichtung zur interferometrischen messung von objekten
DE4224744A1 (de) * 1992-07-27 1994-02-03 Abb Research Ltd Vorrichtung zur Detektion loser Metallteilchen in gasisolierten Hochspannungs-Schaltanlagen
US5469259A (en) * 1994-01-03 1995-11-21 International Business Machines Corporation Inspection interferometer with scanning autofocus, and phase angle control features
US5703684A (en) * 1996-09-23 1997-12-30 International Business Machines Corporation Apparatus for optical differential measurement of glide height above a magnetic disk
US5784163A (en) * 1996-09-23 1998-07-21 International Business Machines Corporation Optical differential profile measurement apparatus and process
US5926266A (en) * 1996-09-23 1999-07-20 International Business Machines Corporation Optical apparatus for rapid defect analysis
CN104897272B (zh) * 2015-06-12 2018-01-05 哈尔滨工业大学 双路圆偏振干涉和双渥拉斯特棱镜分光式零差激光测振仪
CN111982267A (zh) * 2020-08-12 2020-11-24 重庆邮电大学 一种用于声波和振动测量的光纤传感器及其工作方法

Also Published As

Publication number Publication date
DE2133687A1 (de) 1973-01-25
GB1392395A (en) 1975-04-30
FR2145345A5 (ja) 1973-02-16

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