FR2145345A5 - - Google Patents

Info

Publication number
FR2145345A5
FR2145345A5 FR7224821A FR7224821A FR2145345A5 FR 2145345 A5 FR2145345 A5 FR 2145345A5 FR 7224821 A FR7224821 A FR 7224821A FR 7224821 A FR7224821 A FR 7224821A FR 2145345 A5 FR2145345 A5 FR 2145345A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7224821A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of FR2145345A5 publication Critical patent/FR2145345A5/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02067—Active error reduction, i.e. varying with time by electronic control systems, i.e. using feedback acting on optics or light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02067—Active error reduction, i.e. varying with time by electronic control systems, i.e. using feedback acting on optics or light
    • G01B9/02068—Auto-alignment of optical elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Holo Graphy (AREA)
FR7224821A 1971-07-07 1972-06-30 Expired FR2145345A5 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19712133687 DE2133687A1 (de) 1971-07-07 1971-07-07 Anordnung zur stabilisierung der optischen weglaengendifferenz

Publications (1)

Publication Number Publication Date
FR2145345A5 true FR2145345A5 (fr) 1973-02-16

Family

ID=5812868

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7224821A Expired FR2145345A5 (fr) 1971-07-07 1972-06-30

Country Status (4)

Country Link
JP (1) JPS5434347B1 (fr)
DE (1) DE2133687A1 (fr)
FR (1) FR2145345A5 (fr)
GB (1) GB1392395A (fr)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2634210C2 (de) * 1976-07-30 1986-06-05 United Kingdom Atomic Energy Authority, London Interferometer
DE3404963C2 (de) * 1984-02-11 1986-09-25 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 8000 München Laser-Interferometer zur Längenmessung
DE4108062A1 (de) * 1991-03-13 1992-09-17 Man Technologie Gmbh Vorrichtung zur interferometrischen messung von objekten
DE4224744A1 (de) * 1992-07-27 1994-02-03 Abb Research Ltd Vorrichtung zur Detektion loser Metallteilchen in gasisolierten Hochspannungs-Schaltanlagen
US5469259A (en) * 1994-01-03 1995-11-21 International Business Machines Corporation Inspection interferometer with scanning autofocus, and phase angle control features
US5703684A (en) * 1996-09-23 1997-12-30 International Business Machines Corporation Apparatus for optical differential measurement of glide height above a magnetic disk
US5784163A (en) * 1996-09-23 1998-07-21 International Business Machines Corporation Optical differential profile measurement apparatus and process
US5926266A (en) * 1996-09-23 1999-07-20 International Business Machines Corporation Optical apparatus for rapid defect analysis
CN104897272B (zh) * 2015-06-12 2018-01-05 哈尔滨工业大学 双路圆偏振干涉和双渥拉斯特棱镜分光式零差激光测振仪
CN111982267A (zh) * 2020-08-12 2020-11-24 重庆邮电大学 一种用于声波和振动测量的光纤传感器及其工作方法

Also Published As

Publication number Publication date
DE2133687A1 (de) 1973-01-25
GB1392395A (en) 1975-04-30
JPS5434347B1 (fr) 1979-10-26

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Legal Events

Date Code Title Description
ST Notification of lapse