JPS5432316B1 - - Google Patents
Info
- Publication number
- JPS5432316B1 JPS5432316B1 JP7332471A JP7332471A JPS5432316B1 JP S5432316 B1 JPS5432316 B1 JP S5432316B1 JP 7332471 A JP7332471 A JP 7332471A JP 7332471 A JP7332471 A JP 7332471A JP S5432316 B1 JPS5432316 B1 JP S5432316B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
- H01J37/3045—Object or beam position registration
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB4493570 | 1970-09-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5432316B1 true JPS5432316B1 (https=) | 1979-10-13 |
Family
ID=10435289
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7332471A Pending JPS5432316B1 (https=) | 1970-09-21 | 1971-09-20 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US3855023A (https=) |
| JP (1) | JPS5432316B1 (https=) |
| GB (1) | GB1330502A (https=) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4393312A (en) * | 1976-02-05 | 1983-07-12 | Bell Telephone Laboratories, Incorporated | Variable-spot scanning in an electron beam exposure system |
| US4085330A (en) * | 1976-07-08 | 1978-04-18 | Burroughs Corporation | Focused ion beam mask maker |
| US4131472A (en) * | 1976-09-15 | 1978-12-26 | Align-Rite Corporation | Method for increasing the yield of batch processed microcircuit semiconductor devices |
| US4475037A (en) * | 1982-05-11 | 1984-10-02 | International Business Machines Corporation | Method of inspecting a mask using an electron beam vector scan system |
| US4587184A (en) * | 1983-07-27 | 1986-05-06 | Siemens Aktiengesellschaft | Method for manufacturing accurate structures with a high aspect ratio and particularly for manufacturing X-ray absorber masks |
| FR2783971B1 (fr) * | 1998-09-30 | 2002-08-23 | St Microelectronics Sa | Circuit semi-conducteur comprenant des motifs en surface et procede de reglage d'un outil par rapport a cette surface |
| JP4062956B2 (ja) * | 2002-04-24 | 2008-03-19 | ソニー株式会社 | 検出装置、検出方法および電子ビーム照射装置 |
| JP2011034681A (ja) * | 2009-07-29 | 2011-02-17 | Hitachi Displays Ltd | 金属加工方法、金属マスク製造方法及び有機ｅｌ表示装置製造方法 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3535137A (en) * | 1967-01-13 | 1970-10-20 | Ibm | Method of fabricating etch resistant masks |
| US3679497A (en) * | 1969-10-24 | 1972-07-25 | Westinghouse Electric Corp | Electron beam fabrication system and process for use thereof |
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1970
- 1970-09-21 GB GB4493570A patent/GB1330502A/en not_active Expired
-
1971
- 1971-09-20 JP JP7332471A patent/JPS5432316B1/ja active Pending
-
1973
- 1973-08-21 US US00390275A patent/US3855023A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| GB1330502A (en) | 1973-09-19 |
| US3855023A (en) | 1974-12-17 |