JPS5429901B2 - - Google Patents
Info
- Publication number
- JPS5429901B2 JPS5429901B2 JP1802472A JP1802472A JPS5429901B2 JP S5429901 B2 JPS5429901 B2 JP S5429901B2 JP 1802472 A JP1802472 A JP 1802472A JP 1802472 A JP1802472 A JP 1802472A JP S5429901 B2 JPS5429901 B2 JP S5429901B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Light Sources And Details Of Projection-Printing Devices (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Microscoopes, Condenser (AREA)
- Projection-Type Copiers In General (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1802472A JPS5429901B2 (cs) | 1972-02-23 | 1972-02-23 | |
| GB861573A GB1430193A (en) | 1972-02-23 | 1973-02-22 | Illumination optical system of projection printing apparatus |
| DE19732309072 DE2309072C3 (de) | 1972-02-23 | 1973-02-23 | Maskenprojektionskopiervorrichtung |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1802472A JPS5429901B2 (cs) | 1972-02-23 | 1972-02-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4888949A JPS4888949A (cs) | 1973-11-21 |
| JPS5429901B2 true JPS5429901B2 (cs) | 1979-09-27 |
Family
ID=11960084
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1802472A Expired JPS5429901B2 (cs) | 1972-02-23 | 1972-02-23 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JPS5429901B2 (cs) |
| DE (1) | DE2309072C3 (cs) |
| GB (1) | GB1430193A (cs) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56110234A (en) * | 1980-02-06 | 1981-09-01 | Canon Inc | Projection printing device |
| CN106292735B (zh) * | 2016-08-19 | 2019-06-28 | 泉州市汉威机械制造有限公司 | 一种材料影像定位控制方法 |
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1972
- 1972-02-23 JP JP1802472A patent/JPS5429901B2/ja not_active Expired
-
1973
- 1973-02-22 GB GB861573A patent/GB1430193A/en not_active Expired
- 1973-02-23 DE DE19732309072 patent/DE2309072C3/de not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE2309072C3 (de) | 1980-09-25 |
| DE2309072B2 (de) | 1980-01-24 |
| GB1430193A (en) | 1976-03-31 |
| JPS4888949A (cs) | 1973-11-21 |
| DE2309072A1 (de) | 1973-09-13 |