JPS5428381B2 - - Google Patents
Info
- Publication number
- JPS5428381B2 JPS5428381B2 JP13955476A JP13955476A JPS5428381B2 JP S5428381 B2 JPS5428381 B2 JP S5428381B2 JP 13955476 A JP13955476 A JP 13955476A JP 13955476 A JP13955476 A JP 13955476A JP S5428381 B2 JPS5428381 B2 JP S5428381B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13955476A JPS5364636A (en) | 1976-11-22 | 1976-11-22 | Dry etching device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13955476A JPS5364636A (en) | 1976-11-22 | 1976-11-22 | Dry etching device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5364636A JPS5364636A (en) | 1978-06-09 |
| JPS5428381B2 true JPS5428381B2 (OSRAM) | 1979-09-17 |
Family
ID=15247959
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13955476A Granted JPS5364636A (en) | 1976-11-22 | 1976-11-22 | Dry etching device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5364636A (OSRAM) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5625972A (en) * | 1979-08-09 | 1981-03-12 | Fujitsu Ltd | Etching treatment by plasma |
| JPS57154147U (OSRAM) * | 1981-03-20 | 1982-09-28 | ||
| JPS57169241A (en) * | 1981-04-13 | 1982-10-18 | Oki Electric Ind Co Ltd | Dry etching method |
| JPS58225638A (ja) * | 1982-06-24 | 1983-12-27 | Toshiba Corp | エッチング終点検出方法 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51104268A (ja) * | 1975-03-12 | 1976-09-14 | Fujitsu Ltd | Etsuchingusochinoseigyohoho |
-
1976
- 1976-11-22 JP JP13955476A patent/JPS5364636A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5364636A (en) | 1978-06-09 |