JPS5427374A - Method of forming high packing density pattern - Google Patents
Method of forming high packing density patternInfo
- Publication number
- JPS5427374A JPS5427374A JP8824978A JP8824978A JPS5427374A JP S5427374 A JPS5427374 A JP S5427374A JP 8824978 A JP8824978 A JP 8824978A JP 8824978 A JP8824978 A JP 8824978A JP S5427374 A JPS5427374 A JP S5427374A
- Authority
- JP
- Japan
- Prior art keywords
- packing density
- density pattern
- forming high
- high packing
- pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US82076277A | 1977-08-01 | 1977-08-01 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5427374A true JPS5427374A (en) | 1979-03-01 |
Family
ID=25231658
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8824978A Pending JPS5427374A (en) | 1977-08-01 | 1978-07-18 | Method of forming high packing density pattern |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5427374A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01108276A (en) * | 1987-10-21 | 1989-04-25 | Asuku Hiiteingu:Kk | Electrically conductive heat generating coating material |
JPH01158734A (en) * | 1987-12-16 | 1989-06-21 | Toshiba Corp | Manufacture of semiconductor device |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5151283A (en) * | 1974-10-31 | 1976-05-06 | Fujitsu Ltd | Nijurokonyoru bisaimadosakuseihoho |
-
1978
- 1978-07-18 JP JP8824978A patent/JPS5427374A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5151283A (en) * | 1974-10-31 | 1976-05-06 | Fujitsu Ltd | Nijurokonyoru bisaimadosakuseihoho |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01108276A (en) * | 1987-10-21 | 1989-04-25 | Asuku Hiiteingu:Kk | Electrically conductive heat generating coating material |
JPH01158734A (en) * | 1987-12-16 | 1989-06-21 | Toshiba Corp | Manufacture of semiconductor device |
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