JPS5427374A - Method of forming high packing density pattern - Google Patents

Method of forming high packing density pattern

Info

Publication number
JPS5427374A
JPS5427374A JP8824978A JP8824978A JPS5427374A JP S5427374 A JPS5427374 A JP S5427374A JP 8824978 A JP8824978 A JP 8824978A JP 8824978 A JP8824978 A JP 8824978A JP S5427374 A JPS5427374 A JP S5427374A
Authority
JP
Japan
Prior art keywords
packing density
density pattern
forming high
high packing
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8824978A
Other languages
Japanese (ja)
Inventor
Jiyooji Chiyoo Rin
Jiyozefu Buudoruu Rii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Unisys Corp
Original Assignee
Burroughs Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Burroughs Corp filed Critical Burroughs Corp
Publication of JPS5427374A publication Critical patent/JPS5427374A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP8824978A 1977-08-01 1978-07-18 Method of forming high packing density pattern Pending JPS5427374A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US82076277A 1977-08-01 1977-08-01

Publications (1)

Publication Number Publication Date
JPS5427374A true JPS5427374A (en) 1979-03-01

Family

ID=25231658

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8824978A Pending JPS5427374A (en) 1977-08-01 1978-07-18 Method of forming high packing density pattern

Country Status (1)

Country Link
JP (1) JPS5427374A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01108276A (en) * 1987-10-21 1989-04-25 Asuku Hiiteingu:Kk Electrically conductive heat generating coating material
JPH01158734A (en) * 1987-12-16 1989-06-21 Toshiba Corp Manufacture of semiconductor device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5151283A (en) * 1974-10-31 1976-05-06 Fujitsu Ltd Nijurokonyoru bisaimadosakuseihoho

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5151283A (en) * 1974-10-31 1976-05-06 Fujitsu Ltd Nijurokonyoru bisaimadosakuseihoho

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01108276A (en) * 1987-10-21 1989-04-25 Asuku Hiiteingu:Kk Electrically conductive heat generating coating material
JPH01158734A (en) * 1987-12-16 1989-06-21 Toshiba Corp Manufacture of semiconductor device

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