JPS5427116B2 - - Google Patents

Info

Publication number
JPS5427116B2
JPS5427116B2 JP1267873A JP1267873A JPS5427116B2 JP S5427116 B2 JPS5427116 B2 JP S5427116B2 JP 1267873 A JP1267873 A JP 1267873A JP 1267873 A JP1267873 A JP 1267873A JP S5427116 B2 JPS5427116 B2 JP S5427116B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1267873A
Other languages
Japanese (ja)
Other versions
JPS49101812A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1267873A priority Critical patent/JPS5427116B2/ja
Publication of JPS49101812A publication Critical patent/JPS49101812A/ja
Publication of JPS5427116B2 publication Critical patent/JPS5427116B2/ja
Expired legal-status Critical Current

Links

JP1267873A 1973-01-31 1973-01-31 Expired JPS5427116B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1267873A JPS5427116B2 (en) 1973-01-31 1973-01-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1267873A JPS5427116B2 (en) 1973-01-31 1973-01-31

Publications (2)

Publication Number Publication Date
JPS49101812A JPS49101812A (en) 1974-09-26
JPS5427116B2 true JPS5427116B2 (en) 1979-09-07

Family

ID=11812022

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1267873A Expired JPS5427116B2 (en) 1973-01-31 1973-01-31

Country Status (1)

Country Link
JP (1) JPS5427116B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS621246Y2 (en) * 1982-06-17 1987-01-13

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2223865B1 (en) * 1973-03-27 1978-10-20 Thomson Csf
JPS5218337A (en) * 1975-08-01 1977-02-10 Sony Corp Optical unit
JPS5394580U (en) * 1976-12-29 1978-08-01
JPS53147668U (en) * 1977-04-26 1978-11-20
JPS57172202A (en) * 1981-04-17 1982-10-23 Hitachi Ltd Displacement generator
JPS5850008A (en) * 1981-09-21 1983-03-24 Toshiba Corp High-precision moving table device
JPH06105416B2 (en) * 1985-10-14 1994-12-21 株式会社日立製作所 Multi-DOF space fine movement mechanism
JPS62145309A (en) * 1985-12-20 1987-06-29 Canon Inc Precise feeding device
JPH071460B2 (en) * 1987-03-30 1995-01-11 工業技術院長 Displacement control mechanism using piezoelectric element
JPS63299785A (en) * 1987-05-29 1988-12-07 Res Dev Corp Of Japan Micro-movement device employing impact force of piezo-electric and electrostrictive element

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS621246Y2 (en) * 1982-06-17 1987-01-13

Also Published As

Publication number Publication date
JPS49101812A (en) 1974-09-26

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