JPS5427116B2 - - Google Patents
Info
- Publication number
- JPS5427116B2 JPS5427116B2 JP1267873A JP1267873A JPS5427116B2 JP S5427116 B2 JPS5427116 B2 JP S5427116B2 JP 1267873 A JP1267873 A JP 1267873A JP 1267873 A JP1267873 A JP 1267873A JP S5427116 B2 JPS5427116 B2 JP S5427116B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1267873A JPS5427116B2 (en) | 1973-01-31 | 1973-01-31 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1267873A JPS5427116B2 (en) | 1973-01-31 | 1973-01-31 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS49101812A JPS49101812A (en) | 1974-09-26 |
JPS5427116B2 true JPS5427116B2 (en) | 1979-09-07 |
Family
ID=11812022
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1267873A Expired JPS5427116B2 (en) | 1973-01-31 | 1973-01-31 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5427116B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS621246Y2 (en) * | 1982-06-17 | 1987-01-13 |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2223865B1 (en) * | 1973-03-27 | 1978-10-20 | Thomson Csf | |
JPS5218337A (en) * | 1975-08-01 | 1977-02-10 | Sony Corp | Optical unit |
JPS5394580U (en) * | 1976-12-29 | 1978-08-01 | ||
JPS53147668U (en) * | 1977-04-26 | 1978-11-20 | ||
JPS57172202A (en) * | 1981-04-17 | 1982-10-23 | Hitachi Ltd | Displacement generator |
JPS5850008A (en) * | 1981-09-21 | 1983-03-24 | Toshiba Corp | High-precision moving table device |
JPH06105416B2 (en) * | 1985-10-14 | 1994-12-21 | 株式会社日立製作所 | Multi-DOF space fine movement mechanism |
JPS62145309A (en) * | 1985-12-20 | 1987-06-29 | Canon Inc | Precise feeding device |
JPH071460B2 (en) * | 1987-03-30 | 1995-01-11 | 工業技術院長 | Displacement control mechanism using piezoelectric element |
JPS63299785A (en) * | 1987-05-29 | 1988-12-07 | Res Dev Corp Of Japan | Micro-movement device employing impact force of piezo-electric and electrostrictive element |
-
1973
- 1973-01-31 JP JP1267873A patent/JPS5427116B2/ja not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS621246Y2 (en) * | 1982-06-17 | 1987-01-13 |
Also Published As
Publication number | Publication date |
---|---|
JPS49101812A (en) | 1974-09-26 |