JPH06105416B2 - Multi-DOF space fine movement mechanism - Google Patents
Multi-DOF space fine movement mechanismInfo
- Publication number
- JPH06105416B2 JPH06105416B2 JP60227002A JP22700285A JPH06105416B2 JP H06105416 B2 JPH06105416 B2 JP H06105416B2 JP 60227002 A JP60227002 A JP 60227002A JP 22700285 A JP22700285 A JP 22700285A JP H06105416 B2 JPH06105416 B2 JP H06105416B2
- Authority
- JP
- Japan
- Prior art keywords
- base
- connecting portion
- link
- movement mechanism
- fine movement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000002093 peripheral effect Effects 0.000 description 5
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
- B23Q1/50—Movable or adjustable work or tool supports using particular mechanisms with rotating pairs only, the rotating pairs being the first two elements of the mechanism
- B23Q1/54—Movable or adjustable work or tool supports using particular mechanisms with rotating pairs only, the rotating pairs being the first two elements of the mechanism two rotating pairs only
- B23Q1/545—Movable or adjustable work or tool supports using particular mechanisms with rotating pairs only, the rotating pairs being the first two elements of the mechanism two rotating pairs only comprising spherical surfaces
- B23Q1/5462—Movable or adjustable work or tool supports using particular mechanisms with rotating pairs only, the rotating pairs being the first two elements of the mechanism two rotating pairs only comprising spherical surfaces with one supplementary sliding pair
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
- B23Q1/36—Springs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/0009—Constructional details, e.g. manipulator supports, bases
- B25J9/0015—Flexure members, i.e. parts of manipulators having a narrowed section allowing articulation by flexion
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Robotics (AREA)
- Control Of Position Or Direction (AREA)
- Manipulator (AREA)
Description
【発明の詳細な説明】 〔発明の利用分野〕 本発明は空間的な動きを行う自由度機構に係り、とくに
サブミクロンオーダの精度にて位置決めするのに好適な
多自由度空間微動機構に関するものである。Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a degree-of-freedom mechanism for performing spatial movement, and more particularly to a multi-degree-of-freedom spatial fine movement mechanism suitable for positioning with submicron order accuracy. Is.
従来、空間的な動きを行なう多自由度機構に関しては、
たとえば、ヤングおよびリーによる「フイージビリテイ
スタデイ オブ ア プラットフォーム タイプ オ
ブ ロボティック マニピュレーターズ フロム ア
キネマチック ビューポイント（Feasibility Study
of ａ Platform Type of Robotic Manipulators
from ａ Kinematic Viewpoint）」ASMEペーパ83−DE
T−35.1983にスチュアート・プラットフォームについて
論ぜられている。この論文には、たとえば第７図に示す
如く、ベース１と移動台２とを６個のリンク31乃至36に
よって連結されており、これら６個のリンク31乃至36は
夫々中央部のアクチュエータ41乃至46にて長さ方向を調
整可能になっており、かつ両端部とベース１および移動
台２とを球対偶51a,51b乃至56a,56bを介して連結し、移
動台２の空間的な位置および姿勢を自由に変化可能に構
成されたものと略同様なものが記載されている。Conventionally, regarding a multi-degree-of-freedom mechanism that performs spatial movement,
For example, Young and Lee's “Fiji Villity Study of a Platform Type of Robotic Manipulators From A
Kinematic Viewpoint (Feasibility Study
of a Platform Type of Robotic Manipulators
from a Kinematic Viewpoint) "ASME Paper 83-DE
Stuart platform is discussed in T-35.1983. In this paper, for example, as shown in FIG. 7, the base 1 and the moving base 2 are connected by six links 31 to 36, and these six links 31 to 36 are connected to the actuators 41 to 41 in the central portion, respectively. The length direction can be adjusted by 46, and both ends are connected to the base 1 and the movable base 2 via the ball pairs 51a, 51b to 56a, 56b, and the spatial position of the movable base 2 and A thing substantially similar to the one configured so that the posture can be freely changed is described.
しかるに上記の多自由度空間微動機構に使用されている
球対偶51a乃至56aおよび51b乃至56bの構成では、球部の
外周面とこの外周面を摺動する摺動面との間の間隙およ
び両者の加工誤差などにより、たとえアクチユエータ41
乃至46を高精度に形成してこれに接続するリンク31乃至
36の端部の球対偶51a,51乃至56a,56bの球部の軸心方向
位置を一定に保持させたとしても球部の中心位置と、こ
れらの外周面を摺動する摺動面すなわちベース１もしく
は移動台２の揺動中心位置との間にズレを発生する。そ
のため、サブミクロンオーダの精度で移動台２の位置お
よび姿勢を制御することが困難である。However, in the configuration of the ball pairs 51a to 56a and 51b to 56b used in the above-described multi-degree-of-freedom space fine movement mechanism, the gap between the outer peripheral surface of the spherical portion and the sliding surface sliding on this outer peripheral surface and both Due to the processing error of the Actuator 41
To 46 are formed with high precision and links 31 to 46 are connected to this.
Even if the axial direction positions of the spherical parts of the ball pairs 51a, 51 to 56a, 56b at the ends of 36 are held constant, the center position of the spherical parts and the sliding surface, that is, the base, that slides on the outer peripheral surfaces thereof 1 or a shift center position of the movable table 2 is displaced. Therefore, it is difficult to control the position and orientation of the moving table 2 with an accuracy of the order of submicron.
本発明は前記従来の欠点を除去し、簡単な構成で小形化
を可能としかつ移動台の位置および姿勢をサブミクロン
オーダの精度で制御可能とする多自由度空間微動機構を
提供することにある。An object of the present invention is to provide a multi-degree-of-freedom spatial fine movement mechanism which eliminates the above-mentioned conventional drawbacks, can be downsized with a simple structure, and can control the position and posture of a moving table with an accuracy of the submicron order. .
本発明は前記の目的達成するため、相対するベースと移
動台との両者間を、圧電素子により長さ方向に微小駆動
される６本の柱状の伸縮可能なリンクを介して接続し、
前記両者間の相対位置および姿勢を制御する多自由度空
間微動機構において、前記各リンクの各端部を前記ベー
スおよび移動台にそれぞれ一体的に固着し、該固着した
各リンクの両端部付近の軸線の周囲に、球対偶と等価的
な機能を有する該リンクの軸線に回転対称の形状を有す
るＵ字形の切欠きからなる接続部を形成したことを特徴
とするものである。In order to achieve the above-mentioned object, the present invention connects both of a base and a moving base, which face each other, through six columnar expandable and contractable links that are minutely driven in the length direction by a piezoelectric element,
In a multi-degree-of-freedom space fine movement mechanism for controlling the relative position and posture between the two, each end portion of each link is integrally fixed to the base and the moving base, respectively. It is characterized in that a connecting portion composed of a U-shaped notch having a rotationally symmetrical shape is formed around the axis line, which has a function equivalent to that of a sphere pair, and is axially symmetrical to the axis line of the link.
以下、本発明の一実施例を示す第１図および第２図につ
いて説明する。第１図は本発明による多自由度空間微動
機構を示す斜視図、第２図は第１図に示す接続部の拡大
図、第３図は第１図に示すアクチユエータの拡大断面図
である。1 and 2 showing an embodiment of the present invention will be described below. FIG. 1 is a perspective view showing a multi-degree-of-freedom space fine movement mechanism according to the present invention, FIG. 2 is an enlarged view of a connecting portion shown in FIG. 1, and FIG. 3 is an enlarged sectional view of an actuator shown in FIG.
同図において、６はベース、７は移動台、81a乃至86aお
よび81a乃至86bは２個一対で合計12個からなるリンクに
して、夫々外方先端部を上記ベース６および移動台７に
一体的に固着し、その外方先端部付近に巾方向中心線Ｏ
−Ｏ′と対称にその両端部に同一形状をした２個の切欠
穴10a,10bを穿設してこれら２個の切欠穴10a,10b間の巾
Ｗを細く形成し、これによってこの部分の剛性を上記ベ
ース６および移動台７よりも小さくした接続部９を有し
ている。11乃至16は６個のアクチユエータにして夫々筒
状をしてその一端部を開口し、その他端部に一方のリン
ク81a乃至86aまたは81b乃至86bの後端部を螺着するアク
チユエータ本体11a乃至16aと、このアクチユエータ本体
11a乃至16a内に遊嵌し、外周面に上記アクチユエータ本
体11a乃至16aの内周面に介挿する電極11c乃至16cを固定
する圧電素子11b乃至16bと、この圧電素子11b乃至16bの
外方端部に一端部を接続し、他端部に他方のリンク81b
乃至86bまたは81a乃至86aの後端部を螺着する取付部11d
乃至16dとから形成され、上記電極11c乃至16cに電圧を
印加したとき、圧電素子11b乃至16b、アクチユエータ本
体11a乃至16aおよび取付部11d乃至16dを介してリンク81
a乃至86aおよび81b乃至86bの長さを微動させる如くして
いる。なお図示していないが各リンク81a乃至86bおよび
81b乃至86bにはその長さを検出する変位検出器が取付け
られている。In the figure, 6 is a base, 7 is a moving base, and 81a to 86a and 81a to 86b are a pair of two links, a total of 12 links, and their outer tips are integrated with the base 6 and the moving base 7, respectively. Is attached to the center of the width direction O near the outer tip.
Two notched holes 10a, 10b having the same shape are formed at both ends symmetrically with -O 'to form a narrow width W between these two notched holes 10a, 10b, whereby this part It has a connecting portion 9 whose rigidity is smaller than that of the base 6 and the moving table 7. Actuator bodies 11a to 16a 11 to 16 are six actuators, each of which has a tubular shape and one end of which is opened, and the other end of which is screwed to the rear end of one of the links 81a to 86a or 81b to 86b. And this actuator body
Piezoelectric elements 11b to 16b that are loosely fitted in 11a to 16a and fix electrodes 11c to 16c inserted on the inner peripheral surface of the actuator bodies 11a to 16a on the outer peripheral surface, and outer ends of the piezoelectric elements 11b to 16b. One end to the other end and the other end to the other link 81b
To 86b or 81a to 86a, a mounting portion 11d for screwing the rear end portion thereof
Link 16 via the piezoelectric elements 11b to 16b, the actuator bodies 11a to 16a, and the mounting portions 11d to 16d when a voltage is applied to the electrodes 11c to 16c.
The lengths of a to 86a and 81b to 86b are finely adjusted. Although not shown, the links 81a to 86b and
A displacement detector for detecting the length is attached to 81b to 86b.
本発明による自由度空間微動機構は前記の如く構成され
ているから、移動台２よりリンク81a乃至86aおよび81b
乃至86bに力が加わると、接続部９が変形して第２図に
２点鎖線にて示す如く揺動するので、接続部９はその巾
方向中心線Ｏ−Ｏ′上の中心点O1を中心にして回わり対
偶を形成する。Since the degree of freedom space fine movement mechanism according to the present invention is configured as described above, the links 81a to 86a and 81b from the moving base 2 are connected.
When a force is applied to 86b through 86b, the connecting portion 9 is deformed and swings as shown by the chain double-dashed line in FIG. 2, so that the connecting portion 9 has a center point O 1 on its center line OO ′ in the width direction. Rotate around to form a kinematic pair.
またリンク81a乃至86aおよび81b乃至86bにその中心線Ｏ
−Ｏ′を中心点O1を中心にして回動させる力が加わる
と、リンク81a乃至86aおよび81b乃至86bは回動するの
で、接続部９は球対偶と等価的な機能を形成する。Further, the links 81a to 86a and 81b to 86b have their center lines O
When a force to rotate -O 'about the center point O 1 is applied, the links 81a to 86a and 81b to 86b rotate, so that the connection portion 9 forms a function equivalent to a ball pair.
さらにアクチユエータ11乃至16によりリンク81a乃至86a
および81b乃至86bの長さを微動したとき、接続部９の巾
方向中心線Ｏ−Ｏ′上の中心点O1を中心にして曲げられ
てねじり変形をしつつ移動台７の位置および姿勢を制御
するので、接続部９は前記第７図に示す球対偶と同一機
能を行なう。Furthermore, links 81a to 86a are provided by the actuators 11 to 16.
And when the lengths of 81b to 86b are finely moved, the position and the posture of the movable table 7 are changed while being bent about the center point O 1 on the center line OO ′ in the width direction of the connecting portion 9 and being torsionally deformed. Since it is controlled, the connecting portion 9 performs the same function as the sphere pair shown in FIG.
すなわち、上記接続部９は、弾塑性変形により球対偶の
機能を等価的に実現させることができる。また弾塑性変
形のさい接続部９の中心点O1は常に一定位置に保持され
るので、高精度で移動台２の位置および姿勢を制御する
ことができる。That is, the connection portion 9 can equivalently realize the function of the sphere pair by elastic-plastic deformation. Further, since the center point O 1 of the connecting portion 9 during elasto-plastic deformation is always held at a fixed position, the position and posture of the moving table 2 can be controlled with high accuracy.
これに加えてベース６、移動台７、リンク81a乃至86aお
よび81b乃至86b、接続部９がすべて一体に構成され、ア
クチユエータ11乃至16にて連結されているので、構成が
簡単で小形化にすることができ、かつ操作が容易であ
る。In addition to this, the base 6, the moving table 7, the links 81a to 86a and 81b to 86b, and the connecting portion 9 are all integrally configured and connected by the actuators 11 to 16, so that the configuration is simple and downsized. It is possible and easy to operate.
なお前記の実施例においては、各リンクの接続部を巾方
向に２個の切欠穴にて形成した場合について述べたが、
これに限定されるものでなく、例えば第４図に示す如
く、接続部９′を円形状の細径17にしたり第５図に示す
如くリンク18の接続部９″を間隙18aを有する如く２個
に分割し、これらのリンク18を細径の丸棒18bにて接続
したり、第６図に示す如く、リンク19の接続部９にベ
ース６および移動台７よりも剛性の低い材質から形成さ
れた部材19aを介挿したりすることも可能である。In the above embodiment, the case where the connecting portion of each link is formed by two notch holes in the width direction has been described.
The present invention is not limited to this. For example, as shown in FIG. 4, the connecting portion 9'may have a circular small diameter 17 or the connecting portion 9 "of the link 18 may have a gap 18a as shown in FIG. Divide into individual pieces and connect these links 18 with a thin round bar 18b, or, as shown in FIG. 6, form the connecting portion 9 of the link 19 from a material having a lower rigidity than the base 6 and the moving table 7. It is also possible to insert the formed member 19a.
以上述べたる如く、本発明によれば、ベース，移動台，
リンクおよび接続部がすべて一体に構成され、アクチユ
エータに連結されているので、構成が簡単で小形化にす
ることができかつ操作が容易である。As described above, according to the present invention, the base, the moving base,
Since the link and the connecting portion are all integrally formed and connected to the actuator, the structure is simple, the size can be reduced, and the operation is easy.
また上記接続部が弾塑性変形により球対偶の機能を等価
的に実現させることができ、かつ弾塑性変形のさい、接
続部の中心位置を常に一定に保持することができるの
で、サブミクロンオーダの精度で移動台の位置および姿
勢を制御することができる。Further, since the above-mentioned connecting portion can equivalently realize the function of the sphere pair by elasto-plastic deformation, and during the elasto-plastic deformation, the central position of the connecting portion can be always kept constant, so that the sub-micron order It is possible to control the position and orientation of the moving table with accuracy.
第１図は本発明の一実施例を示す多自由度空間微動機構
の斜視図、第２図は第１図に示す接続部の拡大図、第３
図は第１図に示すアクチユエータの拡大断面図、第４図
は第１図に示す接続部の他の一実施例を示す斜視図、第
５図は第１図に示す接続部のさらに他の一実施例を示す
斜視図、第６図は第１図に示す接続部のさらに他の一実
施例を示す斜視図、第７図は従来の多自由度空間移動機
構を示す斜視図である。 1,6……ベース、2,7……移動台、31〜36,81a〜86a,81b
〜86b……リンク、11…16、41〜46……アクチユエー
タ、51a〜56a,51b〜56b……球対偶、9,9′,9″,9……
接続部、10a,10b……切欠穴、11〜16……アクチユエー
タ。1 is a perspective view of a multi-degree-of-freedom space fine movement mechanism showing an embodiment of the present invention, FIG. 2 is an enlarged view of a connecting portion shown in FIG. 1, and FIG.
1 is an enlarged sectional view of the actuator shown in FIG. 1, FIG. 4 is a perspective view showing another embodiment of the connecting portion shown in FIG. 1, and FIG. 5 is still another portion of the connecting portion shown in FIG. FIG. 6 is a perspective view showing one embodiment, FIG. 6 is a perspective view showing still another embodiment of the connecting portion shown in FIG. 1, and FIG. 7 is a perspective view showing a conventional multi-degree-of-freedom space moving mechanism. 1,6 ... Base, 2,7 ... Mobile platform, 31-36,81a-86a, 81b
~ 86b …… Link, 11… 16, 41 ～ 46 …… Actuator, 51a ～ 56a, 51b ～ 56b …… Ball pair, 9,9 ′, 9 ″, 9 ……
Connection parts, 10a, 10b ... Notch holes, 11-16 ... Actuator.
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭60−155394（ＪＰ，Ａ) 特開 昭60−52230（ＪＰ，Ａ) 特開 昭49−101812（ＪＰ，Ａ) 実開 昭50−5335（ＪＰ，Ｕ) ─────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-60-155394 (JP, A) JP-A-60-52230 (JP, A) JP-A-49-101812 (JP, A) Actual development Sho-50- 5335 (JP, U)
Claims (1)
電素子により長さ方向に微小駆動される６本の柱状の伸
縮可能なリンクを介して接続し、前記両者間の相対位置
および姿勢を制御する多自由度空間微動機構において、
前記各リンクの各端部を前記ベースおよび移動台にそれ
ぞれ一体的に固着し、該固着した各リンクの両端部付近
に、球対偶と等価的な機能を有する該リンクの軸線に回
転対称の形状を有するＵ字形の切欠きからなる接続部を
形成したことを特徴とする多自由度空間微動機構。1. A base and a moving base, which face each other, are connected via six columnar expandable links that are finely driven in the length direction by a piezoelectric element, and the relative position between them and In the multi-degree-of-freedom spatial fine motion mechanism that controls the posture,
Each end of each link is integrally fixed to the base and the moving base, respectively, and a shape of rotational symmetry about the axis of the link having a function equivalent to a sphere pair near both ends of each fixed link. A multi-degree-of-freedom space fine movement mechanism having a U-shaped notch having a connecting portion formed therein.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60227002A JPH06105416B2 (en) | 1985-10-14 | 1985-10-14 | Multi-DOF space fine movement mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60227002A JPH06105416B2 (en) | 1985-10-14 | 1985-10-14 | Multi-DOF space fine movement mechanism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6288008A JPS6288008A (en) | 1987-04-22 |
| JPH06105416B2 true JPH06105416B2 (en) | 1994-12-21 |
Family
ID=16853967
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60227002A Expired - Lifetime JPH06105416B2 (en) | 1985-10-14 | 1985-10-14 | Multi-DOF space fine movement mechanism |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06105416B2 (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH071452B2 (en) * | 1987-03-17 | 1995-01-11 | 日立建機株式会社 | Fine positioning device |
| JPH071455B2 (en) * | 1987-06-08 | 1995-01-11 | 日立建機株式会社 | Fine positioning device |
| FR2817784B1 (en) * | 2000-12-08 | 2003-04-18 | Renault Automation Comau | MACHINE-TOOL INCLUDING PARALLEL ARCHITECTURE ADOPTING ARTICULATIONS WITH DEFORMATION AND ARTICULATION WITH ADAPTED DEFORMATION |
| JPWO2007069667A1 (en) * | 2005-12-15 | 2009-05-21 | 国立大学法人東京工業大学 | Elastic joint device |
| CN101546090B (en) * | 2008-03-25 | 2011-09-28 | 鸿富锦精密工业（深圳）有限公司 | Imaging device |
| CN107414787A (en) * | 2017-03-24 | 2017-12-01 | 中国科学院长春光学精密机械与物理研究所 | A kind of 6 SPS configuration Six Degree-of-Freedom Parallel Platforms for preventing supporting leg rotation |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5427116B2 (en) * | 1973-01-31 | 1979-09-07 | ||
| JPS5052230A (en) * | 1973-09-01 | 1975-05-09 | ||
| JPS588052A (en) * | 1981-07-07 | 1983-01-18 | Sumitomo Chem Co Ltd | Preparation of phenyl isocyanate compound |
| JPS6052230A (en) * | 1983-09-02 | 1985-03-25 | Omron Tateisi Electronics Co | Minutely moving stage mechanism |
| JPS60155394A (en) * | 1984-01-25 | 1985-08-15 | 住友電気工業株式会社 | Wrist mechanism of robot |
-
1985
- 1985-10-14 JP JP60227002A patent/JPH06105416B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6288008A (en) | 1987-04-22 |
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