JPS5424913B2 - - Google Patents
Info
- Publication number
- JPS5424913B2 JPS5424913B2 JP14687575A JP14687575A JPS5424913B2 JP S5424913 B2 JPS5424913 B2 JP S5424913B2 JP 14687575 A JP14687575 A JP 14687575A JP 14687575 A JP14687575 A JP 14687575A JP S5424913 B2 JPS5424913 B2 JP S5424913B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/542—Controlling the film thickness or evaporation rate
- C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
- C23C14/547—Controlling the film thickness or evaporation rate using measurement on deposited material using optical methods
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14687575A JPS5271389A (en) | 1975-12-11 | 1975-12-11 | Film thicknes monitoring device of thin flm forming apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14687575A JPS5271389A (en) | 1975-12-11 | 1975-12-11 | Film thicknes monitoring device of thin flm forming apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5271389A JPS5271389A (en) | 1977-06-14 |
| JPS5424913B2 true JPS5424913B2 (Direct) | 1979-08-24 |
Family
ID=15417530
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14687575A Granted JPS5271389A (en) | 1975-12-11 | 1975-12-11 | Film thicknes monitoring device of thin flm forming apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5271389A (Direct) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55500588A (Direct) * | 1978-08-18 | 1980-09-04 | ||
| EP0082654A1 (en) * | 1981-12-19 | 1983-06-29 | General Engineering Radcliffe 1979 Limited | Apparatus for and a method of coating a length of material |
-
1975
- 1975-12-11 JP JP14687575A patent/JPS5271389A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5271389A (en) | 1977-06-14 |