JPS5271389A - Film thicknes monitoring device of thin flm forming apparatus - Google Patents

Film thicknes monitoring device of thin flm forming apparatus

Info

Publication number
JPS5271389A
JPS5271389A JP14687575A JP14687575A JPS5271389A JP S5271389 A JPS5271389 A JP S5271389A JP 14687575 A JP14687575 A JP 14687575A JP 14687575 A JP14687575 A JP 14687575A JP S5271389 A JPS5271389 A JP S5271389A
Authority
JP
Japan
Prior art keywords
forming apparatus
monitoring device
thin flm
film thicknes
thicknes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14687575A
Other languages
Japanese (ja)
Other versions
JPS5424913B2 (en
Inventor
Akihiko Isao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP14687575A priority Critical patent/JPS5271389A/en
Publication of JPS5271389A publication Critical patent/JPS5271389A/en
Publication of JPS5424913B2 publication Critical patent/JPS5424913B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
    • C23C14/547—Controlling the film thickness or evaporation rate using measurement on deposited material using optical methods

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:A film thickness monitoring device of a thin film forming apparatus in which a material to be treated is separated into the material proper and monitoring portion beside it and film thickness can be monitored at the monitoring portion.
JP14687575A 1975-12-11 1975-12-11 Film thicknes monitoring device of thin flm forming apparatus Granted JPS5271389A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14687575A JPS5271389A (en) 1975-12-11 1975-12-11 Film thicknes monitoring device of thin flm forming apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14687575A JPS5271389A (en) 1975-12-11 1975-12-11 Film thicknes monitoring device of thin flm forming apparatus

Publications (2)

Publication Number Publication Date
JPS5271389A true JPS5271389A (en) 1977-06-14
JPS5424913B2 JPS5424913B2 (en) 1979-08-24

Family

ID=15417530

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14687575A Granted JPS5271389A (en) 1975-12-11 1975-12-11 Film thicknes monitoring device of thin flm forming apparatus

Country Status (1)

Country Link
JP (1) JPS5271389A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55500588A (en) * 1978-08-18 1980-09-04
EP0082654A1 (en) * 1981-12-19 1983-06-29 General Engineering Radcliffe 1979 Limited Apparatus for and a method of coating a length of material
EP0236310A1 (en) * 1985-09-12 1987-09-16 Dennison Manufacturing Company Metallization of substrates

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0647058Y2 (en) * 1986-12-22 1994-11-30 松下電工株式会社 Ceiling material structure

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55500588A (en) * 1978-08-18 1980-09-04
EP0082654A1 (en) * 1981-12-19 1983-06-29 General Engineering Radcliffe 1979 Limited Apparatus for and a method of coating a length of material
EP0236310A1 (en) * 1985-09-12 1987-09-16 Dennison Manufacturing Company Metallization of substrates

Also Published As

Publication number Publication date
JPS5424913B2 (en) 1979-08-24

Similar Documents

Publication Publication Date Title
JPS5245670A (en) Method and device for manufacturing film
JPS51122983A (en) Incising device and method thereof
JPS5257584A (en) Sheet material for punching and mathod of punching the same and apparatus therefor
JPS5334284A (en) Method of transporting material by means of pipe and its device
JPS51151676A (en) Thin membrane treating apparatus and method
IT1072255B (en) PROCESS AND DEVICE FOR THE IMPRESSION OF A FLAT AND THIN MATERIAL
JPS5263101A (en) Method and device for breaking hard material
JPS51143267A (en) Method and device for conveying material
JPS51112427A (en) Method of continuously making mixture for mold and the like and device for embodying the method
JPS5337541A (en) Method of coating only one side of stripplike material and apparatus for said method
JPS57126309A (en) Device for treating and vibrating material
BE858480A (en) PROCESS AND APPARATUS FOR ADHESTING ENVELOPES OF SHEET MATERIAL AND THE LIKE
ZA772962B (en) Method of and apparatus for the treatment of material
FR2326280A1 (en) METHOD AND DEVICE FOR PRODUCING PARAISONS IN THERMOPLASTIC MATERIAL
JPS5271389A (en) Film thicknes monitoring device of thin flm forming apparatus
JPS51133762A (en) Method of and device for manufacturing layered plate
IL50520A (en) Pipe of thermoplastic material and method for the production thereof
JPS5293077A (en) Device and method of processing material
ZA763714B (en) A method and a device for the continuous production of a strip of foam material
CY1080A (en) Footwear process and device for the production thereof
JPS5313924A (en) Method and device for rapidly treating photographic material
JPS5278970A (en) Method and device for forming sheet material
BE842746A (en) METHOD AND DEVICE FOR TREATING LAYERS OF MATERIAL FORMED ON FILTERS
JPS5232325A (en) Method and device for feeding thin article
JPS51148598A (en) Method and device for making material piece for package