JPS5423572B1 - - Google Patents

Info

Publication number
JPS5423572B1
JPS5423572B1 JP2403872A JP2403872A JPS5423572B1 JP S5423572 B1 JPS5423572 B1 JP S5423572B1 JP 2403872 A JP2403872 A JP 2403872A JP 2403872 A JP2403872 A JP 2403872A JP S5423572 B1 JPS5423572 B1 JP S5423572B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2403872A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5423572B1 publication Critical patent/JPS5423572B1/ja
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/022Quinonediazides
    • G03F7/023Macromolecular quinonediazides; Macromolecular additives, e.g. binders
    • G03F7/0233Macromolecular quinonediazides; Macromolecular additives, e.g. binders characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Epoxy Resins (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Materials For Photolithography (AREA)
JP2403872A 1971-03-13 1972-03-10 Pending JPS5423572B1 (enExample)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7103379A NL7103379A (enExample) 1971-03-13 1971-03-13

Publications (1)

Publication Number Publication Date
JPS5423572B1 true JPS5423572B1 (enExample) 1979-08-15

Family

ID=19812677

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2403872A Pending JPS5423572B1 (enExample) 1971-03-13 1972-03-10

Country Status (8)

Country Link
JP (1) JPS5423572B1 (enExample)
BE (1) BE780621A (enExample)
CA (1) CA978013A (enExample)
DE (1) DE2208421A1 (enExample)
FR (1) FR2130167B1 (enExample)
GB (1) GB1334811A (enExample)
IT (1) IT952955B (enExample)
NL (1) NL7103379A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0302941B1 (en) * 1987-02-02 1993-12-29 Nippon Paint Co., Ltd. Positive photosensitive resin composition and process for its production
US12393115B2 (en) 2018-09-05 2025-08-19 Merck Patent Gmbh Positive working photosensitive material

Also Published As

Publication number Publication date
CA978013A (en) 1975-11-18
GB1334811A (en) 1973-10-24
DE2208421A1 (de) 1972-09-21
IT952955B (it) 1973-07-30
FR2130167B1 (enExample) 1977-01-14
FR2130167A1 (enExample) 1972-11-03
NL7103379A (enExample) 1972-09-15
BE780621A (fr) 1972-09-13

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