JPS5420976A - Thin film forming device - Google Patents

Thin film forming device

Info

Publication number
JPS5420976A
JPS5420976A JP8651877A JP8651877A JPS5420976A JP S5420976 A JPS5420976 A JP S5420976A JP 8651877 A JP8651877 A JP 8651877A JP 8651877 A JP8651877 A JP 8651877A JP S5420976 A JPS5420976 A JP S5420976A
Authority
JP
Japan
Prior art keywords
thin film
film forming
forming device
chamber
small openings
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8651877A
Other languages
Japanese (ja)
Inventor
Takao Furuse
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP8651877A priority Critical patent/JPS5420976A/en
Publication of JPS5420976A publication Critical patent/JPS5420976A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To obtain a good quality thin film with little damage due to ionic impulse by dividing a vacuum vessel into a discharge chamber and a thin film forming chamber with a discharge electrode having small openings which serves as a partition wall, too, and introducing a sputtered substance in the discharge chamber into the thin film forming chamber through the small openings.
JP8651877A 1977-07-18 1977-07-18 Thin film forming device Pending JPS5420976A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8651877A JPS5420976A (en) 1977-07-18 1977-07-18 Thin film forming device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8651877A JPS5420976A (en) 1977-07-18 1977-07-18 Thin film forming device

Publications (1)

Publication Number Publication Date
JPS5420976A true JPS5420976A (en) 1979-02-16

Family

ID=13889196

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8651877A Pending JPS5420976A (en) 1977-07-18 1977-07-18 Thin film forming device

Country Status (1)

Country Link
JP (1) JPS5420976A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6352132A (en) * 1986-04-10 1988-03-05 Fuji Photo Film Co Ltd Formation of solid particle film

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6352132A (en) * 1986-04-10 1988-03-05 Fuji Photo Film Co Ltd Formation of solid particle film

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