JPS5419142B2 - - Google Patents
Info
- Publication number
- JPS5419142B2 JPS5419142B2 JP4333275A JP4333275A JPS5419142B2 JP S5419142 B2 JPS5419142 B2 JP S5419142B2 JP 4333275 A JP4333275 A JP 4333275A JP 4333275 A JP4333275 A JP 4333275A JP S5419142 B2 JPS5419142 B2 JP S5419142B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50043332A JPS51118968A (en) | 1975-04-11 | 1975-04-11 | Electron beam exposure device |
| US05/675,170 US4063103A (en) | 1975-04-11 | 1976-04-08 | Electron beam exposure apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50043332A JPS51118968A (en) | 1975-04-11 | 1975-04-11 | Electron beam exposure device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51118968A JPS51118968A (en) | 1976-10-19 |
| JPS5419142B2 true JPS5419142B2 (enExample) | 1979-07-12 |
Family
ID=12660866
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50043332A Granted JPS51118968A (en) | 1975-04-11 | 1975-04-11 | Electron beam exposure device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS51118968A (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54148483A (en) * | 1978-05-15 | 1979-11-20 | Nippon Telegr & Teleph Corp <Ntt> | Automatic detecting method for reference mark of exposure |
| JPS553603A (en) * | 1978-06-21 | 1980-01-11 | Toshiba Corp | Electron beam exposure device |
| JPS5683032A (en) * | 1979-12-12 | 1981-07-07 | Fujitsu Ltd | Exposing device of electronic beam |
| JPS56153739A (en) * | 1981-04-09 | 1981-11-27 | Fujitsu Ltd | Exposing method for electron beam |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5512058B2 (enExample) * | 1972-06-20 | 1980-03-29 | ||
| JPS5240459B2 (enExample) * | 1973-05-30 | 1977-10-12 | ||
| US3900737A (en) * | 1974-04-18 | 1975-08-19 | Bell Telephone Labor Inc | Electron beam exposure system |
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1975
- 1975-04-11 JP JP50043332A patent/JPS51118968A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS51118968A (en) | 1976-10-19 |