JPS5419142B2 - - Google Patents

Info

Publication number
JPS5419142B2
JPS5419142B2 JP4333275A JP4333275A JPS5419142B2 JP S5419142 B2 JPS5419142 B2 JP S5419142B2 JP 4333275 A JP4333275 A JP 4333275A JP 4333275 A JP4333275 A JP 4333275A JP S5419142 B2 JPS5419142 B2 JP S5419142B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4333275A
Other languages
Japanese (ja)
Other versions
JPS51118968A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP50043332A priority Critical patent/JPS51118968A/en
Priority to US05/675,170 priority patent/US4063103A/en
Publication of JPS51118968A publication Critical patent/JPS51118968A/en
Publication of JPS5419142B2 publication Critical patent/JPS5419142B2/ja
Granted legal-status Critical Current

Links

JP50043332A 1975-04-11 1975-04-11 Electron beam exposure device Granted JPS51118968A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP50043332A JPS51118968A (en) 1975-04-11 1975-04-11 Electron beam exposure device
US05/675,170 US4063103A (en) 1975-04-11 1976-04-08 Electron beam exposure apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50043332A JPS51118968A (en) 1975-04-11 1975-04-11 Electron beam exposure device

Publications (2)

Publication Number Publication Date
JPS51118968A JPS51118968A (en) 1976-10-19
JPS5419142B2 true JPS5419142B2 (en) 1979-07-12

Family

ID=12660866

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50043332A Granted JPS51118968A (en) 1975-04-11 1975-04-11 Electron beam exposure device

Country Status (1)

Country Link
JP (1) JPS51118968A (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54148483A (en) * 1978-05-15 1979-11-20 Nippon Telegr & Teleph Corp <Ntt> Automatic detecting method for reference mark of exposure
JPS553603A (en) * 1978-06-21 1980-01-11 Toshiba Corp Electron beam exposure device
JPS5683032A (en) * 1979-12-12 1981-07-07 Fujitsu Ltd Exposing device of electronic beam
JPS56153739A (en) * 1981-04-09 1981-11-27 Fujitsu Ltd Exposing method for electron beam

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4921445A (en) * 1972-06-20 1974-02-25
JPS509127A (en) * 1973-05-30 1975-01-30
JPS50145865A (en) * 1974-04-18 1975-11-22

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4921445A (en) * 1972-06-20 1974-02-25
JPS509127A (en) * 1973-05-30 1975-01-30
JPS50145865A (en) * 1974-04-18 1975-11-22

Also Published As

Publication number Publication date
JPS51118968A (en) 1976-10-19

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