JPS5418439B2 - - Google Patents
Info
- Publication number
- JPS5418439B2 JPS5418439B2 JP4676973A JP4676973A JPS5418439B2 JP S5418439 B2 JPS5418439 B2 JP S5418439B2 JP 4676973 A JP4676973 A JP 4676973A JP 4676973 A JP4676973 A JP 4676973A JP S5418439 B2 JPS5418439 B2 JP S5418439B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/063—Geometrical arrangement of electrodes for beam-forming
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K15/00—Electron-beam welding or cutting
- B23K15/002—Devices involving relative movement between electronbeam and workpiece
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Electron Sources, Ion Sources (AREA)
- Particle Accelerators (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH624972A CH551083A (de) | 1972-04-26 | 1972-04-26 | Elektronenstrahlerzeugungssystem zur materialbearbeitung. |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4954799A JPS4954799A (enExample) | 1974-05-28 |
| JPS5418439B2 true JPS5418439B2 (enExample) | 1979-07-07 |
Family
ID=4306605
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4676973A Expired JPS5418439B2 (enExample) | 1972-04-26 | 1973-04-26 |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JPS5418439B2 (enExample) |
| CH (1) | CH551083A (enExample) |
| DE (1) | DE7312299U (enExample) |
| FR (1) | FR2182047B1 (enExample) |
| GB (1) | GB1373478A (enExample) |
| NL (1) | NL152401B (enExample) |
-
1972
- 1972-04-26 CH CH624972A patent/CH551083A/xx not_active IP Right Cessation
- 1972-06-13 NL NL7208078A patent/NL152401B/xx not_active IP Right Cessation
-
1973
- 1973-03-31 DE DE19737312299 patent/DE7312299U/de not_active Expired
- 1973-04-10 GB GB1709373A patent/GB1373478A/en not_active Expired
- 1973-04-25 FR FR7314905A patent/FR2182047B1/fr not_active Expired
- 1973-04-26 JP JP4676973A patent/JPS5418439B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| CH551083A (de) | 1974-06-28 |
| JPS4954799A (enExample) | 1974-05-28 |
| DE2316257A1 (de) | 1973-11-15 |
| NL7208078A (enExample) | 1973-10-30 |
| DE2316257B2 (de) | 1975-03-27 |
| NL152401B (nl) | 1977-02-15 |
| FR2182047A1 (enExample) | 1973-12-07 |
| DE7312299U (de) | 1977-09-08 |
| FR2182047B1 (enExample) | 1978-06-23 |
| GB1373478A (en) | 1974-11-13 |