JPS5418281A - Charged particle beam device - Google Patents
Charged particle beam deviceInfo
- Publication number
- JPS5418281A JPS5418281A JP8282877A JP8282877A JPS5418281A JP S5418281 A JPS5418281 A JP S5418281A JP 8282877 A JP8282877 A JP 8282877A JP 8282877 A JP8282877 A JP 8282877A JP S5418281 A JPS5418281 A JP S5418281A
- Authority
- JP
- Japan
- Prior art keywords
- charged particle
- particle beam
- beam device
- deflecting plate
- reflector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
PURPOSE: To ensure a high-precision location measurement by giving a function of a standard reflector in the optical length measuring device to the charged particle beam deflecting plate or attaching a reflector to the deflecting plate.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8282877A JPS5418281A (en) | 1977-07-11 | 1977-07-11 | Charged particle beam device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8282877A JPS5418281A (en) | 1977-07-11 | 1977-07-11 | Charged particle beam device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5418281A true JPS5418281A (en) | 1979-02-10 |
JPS6123648B2 JPS6123648B2 (en) | 1986-06-06 |
Family
ID=13785249
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8282877A Granted JPS5418281A (en) | 1977-07-11 | 1977-07-11 | Charged particle beam device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5418281A (en) |
-
1977
- 1977-07-11 JP JP8282877A patent/JPS5418281A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6123648B2 (en) | 1986-06-06 |
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