JPS5418281A - Charged particle beam device - Google Patents

Charged particle beam device

Info

Publication number
JPS5418281A
JPS5418281A JP8282877A JP8282877A JPS5418281A JP S5418281 A JPS5418281 A JP S5418281A JP 8282877 A JP8282877 A JP 8282877A JP 8282877 A JP8282877 A JP 8282877A JP S5418281 A JPS5418281 A JP S5418281A
Authority
JP
Japan
Prior art keywords
charged particle
particle beam
beam device
deflecting plate
reflector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8282877A
Other languages
Japanese (ja)
Other versions
JPS6123648B2 (en
Inventor
Akio Mikajiri
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP8282877A priority Critical patent/JPS5418281A/en
Publication of JPS5418281A publication Critical patent/JPS5418281A/en
Publication of JPS6123648B2 publication Critical patent/JPS6123648B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE: To ensure a high-precision location measurement by giving a function of a standard reflector in the optical length measuring device to the charged particle beam deflecting plate or attaching a reflector to the deflecting plate.
COPYRIGHT: (C)1979,JPO&Japio
JP8282877A 1977-07-11 1977-07-11 Charged particle beam device Granted JPS5418281A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8282877A JPS5418281A (en) 1977-07-11 1977-07-11 Charged particle beam device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8282877A JPS5418281A (en) 1977-07-11 1977-07-11 Charged particle beam device

Publications (2)

Publication Number Publication Date
JPS5418281A true JPS5418281A (en) 1979-02-10
JPS6123648B2 JPS6123648B2 (en) 1986-06-06

Family

ID=13785249

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8282877A Granted JPS5418281A (en) 1977-07-11 1977-07-11 Charged particle beam device

Country Status (1)

Country Link
JP (1) JPS5418281A (en)

Also Published As

Publication number Publication date
JPS6123648B2 (en) 1986-06-06

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