JPS541629B2 - - Google Patents

Info

Publication number
JPS541629B2
JPS541629B2 JP9729073A JP9729073A JPS541629B2 JP S541629 B2 JPS541629 B2 JP S541629B2 JP 9729073 A JP9729073 A JP 9729073A JP 9729073 A JP9729073 A JP 9729073A JP S541629 B2 JPS541629 B2 JP S541629B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9729073A
Other languages
Japanese (ja)
Other versions
JPS5046486A (zh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9729073A priority Critical patent/JPS541629B2/ja
Publication of JPS5046486A publication Critical patent/JPS5046486A/ja
Publication of JPS541629B2 publication Critical patent/JPS541629B2/ja
Expired legal-status Critical Current

Links

JP9729073A 1973-08-31 1973-08-31 Expired JPS541629B2 (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9729073A JPS541629B2 (zh) 1973-08-31 1973-08-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9729073A JPS541629B2 (zh) 1973-08-31 1973-08-31

Publications (2)

Publication Number Publication Date
JPS5046486A JPS5046486A (zh) 1975-04-25
JPS541629B2 true JPS541629B2 (zh) 1979-01-26

Family

ID=14188357

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9729073A Expired JPS541629B2 (zh) 1973-08-31 1973-08-31

Country Status (1)

Country Link
JP (1) JPS541629B2 (zh)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020004178A1 (ja) 2018-06-25 2020-01-02 川崎重工業株式会社 導光装置及びレーザ加工装置
WO2020004177A1 (ja) 2018-06-25 2020-01-02 川崎重工業株式会社 導光装置及びレーザ加工装置
WO2020162557A1 (ja) 2019-02-07 2020-08-13 川崎重工業株式会社 ポリゴンミラー、導光装置及び光走査装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5412568A (en) * 1977-06-29 1979-01-30 Sanyo Electric Co Ltd Aligning method of semiconductor wafers

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS513744U (zh) * 1974-06-26 1976-01-12

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS513744U (zh) * 1974-06-26 1976-01-12

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020004178A1 (ja) 2018-06-25 2020-01-02 川崎重工業株式会社 導光装置及びレーザ加工装置
WO2020004177A1 (ja) 2018-06-25 2020-01-02 川崎重工業株式会社 導光装置及びレーザ加工装置
KR20210008093A (ko) 2018-06-25 2021-01-20 카와사키 주코교 카부시키가이샤 도광 장치 및 레이저 가공 장치
KR20210008094A (ko) 2018-06-25 2021-01-20 카와사키 주코교 카부시키가이샤 도광 장치 및 레이저 가공 장치
WO2020162557A1 (ja) 2019-02-07 2020-08-13 川崎重工業株式会社 ポリゴンミラー、導光装置及び光走査装置

Also Published As

Publication number Publication date
JPS5046486A (zh) 1975-04-25

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