JPS5046486A - - Google Patents

Info

Publication number
JPS5046486A
JPS5046486A JP9729073A JP9729073A JPS5046486A JP S5046486 A JPS5046486 A JP S5046486A JP 9729073 A JP9729073 A JP 9729073A JP 9729073 A JP9729073 A JP 9729073A JP S5046486 A JPS5046486 A JP S5046486A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9729073A
Other languages
Japanese (ja)
Other versions
JPS541629B2 (zh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9729073A priority Critical patent/JPS541629B2/ja
Publication of JPS5046486A publication Critical patent/JPS5046486A/ja
Publication of JPS541629B2 publication Critical patent/JPS541629B2/ja
Expired legal-status Critical Current

Links

JP9729073A 1973-08-31 1973-08-31 Expired JPS541629B2 (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9729073A JPS541629B2 (zh) 1973-08-31 1973-08-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9729073A JPS541629B2 (zh) 1973-08-31 1973-08-31

Publications (2)

Publication Number Publication Date
JPS5046486A true JPS5046486A (zh) 1975-04-25
JPS541629B2 JPS541629B2 (zh) 1979-01-26

Family

ID=14188357

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9729073A Expired JPS541629B2 (zh) 1973-08-31 1973-08-31

Country Status (1)

Country Link
JP (1) JPS541629B2 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5412568A (en) * 1977-06-29 1979-01-30 Sanyo Electric Co Ltd Aligning method of semiconductor wafers

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7136602B2 (ja) 2018-06-25 2022-09-13 川崎重工業株式会社 導光装置及びレーザ加工装置
JP7136601B2 (ja) 2018-06-25 2022-09-13 川崎重工業株式会社 導光装置及びレーザ加工装置
JP7193367B2 (ja) 2019-02-07 2022-12-20 川崎重工業株式会社 ポリゴンミラー、導光装置及び光走査装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS513744U (zh) * 1974-06-26 1976-01-12

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS513744U (zh) * 1974-06-26 1976-01-12

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5412568A (en) * 1977-06-29 1979-01-30 Sanyo Electric Co Ltd Aligning method of semiconductor wafers
JPS5646257B2 (zh) * 1977-06-29 1981-10-31

Also Published As

Publication number Publication date
JPS541629B2 (zh) 1979-01-26

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